Used AXCELIS Optima MD #293628043 for sale
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ID: 293628043
Wafer Size: 12"
Vintage: 2006
Ion implanter, 12"
Medium current implant
Injector
Target positioning or scanning system
CIM: GEM
Gas box
Factory interface: (4) FOUP
Charge control: PLASMA Flood gun, 12" (HP Xe DIN 6 Connection)
End station
Handler system:
AXCELIS Vacuum robot
YASKAWA XU-RC400M-A00 Robot ATM
Linear scan system
CTI Cryo pump system:
IS8
(2) IS250
(2) IS320
(2) PFEIFFER Turbo pumps TMH 1201 for beamline
(2) BUSCH BC100 Rough pumps source or LL+ Transfer
(6) String lines:
Line 1: HP Argon VCR 1/4"
Line 2: SDS PH3 VCR 1/2"
Line 3: SDS AsH3 VCR 1/2"
Line 4: SDS BF3 VCR 1/4"
Line 5: SDS GeF4 VCR 1/4"
Line 6: HP Xe DIN 6
AFFINITY Chiller
(2) CTI Cryo Compressors
2006 Vintage.
AXCELIS Optima MD is an ion implanter and monitor with both digital and analog functionality. This machine is designed to help with the processing of semiconductor wafers in a variety of industries. Its flexibility and accuracy makes it particularly well-suited for today's wafer fabrication processes. Optima MD offers a wide range of processes, such as ion implantation, glass deposition, and epitaxial growth. It can implant both light and heavy ions and can be used for varied energy ranges up to 200 keV and doses up to 2x1016 ions/cm2. It also offers a variety of source options to suit different wafer requirements. Furthermore, the machine features an onboard end point detection system to ensure implant accuracy, along with automated wafer alignment. The implanter's digital features provide easy and comprehensive recipe control. A GUI-based monitor and control package allows users to access a variety of recipes and customize parameters to suit individual processes. The machine also includes advanced diagnostics, as well as an alarm and status panel with real-time data display. AXCELIS Optima MD comes with a rugged stainless steel housing and a controlling platform. It also provides a range of additional accessories and components, such as ion beam scanning systems and process control modules. This system is designed to be easily and intuitively operated, even by staff with limited experience. Optima MD can provide a comprehensive and reliable solution for ion implantation processing. It is one of the most efficient and accurate machines available thanks to its flexible design, robust digital platform and wide range of features. In addition, it is easy to use and set up, making it the perfect choice for any wafer fabrication process.
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