Used AXCELIS Optima MD #293723865 for sale
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ID: 293723865
Wafer Size: 12"
Vintage: 2007
Medium ion implanter, 12"
(4) FOUPs
AXCELIS Vacuum robot
LINAER Scan system
(2) PFEIFFER TMH 1201 Turbo pumps
HP Xe DIN 6 Connector
Injector system
End station
Target positioning / scannning system
(2) YASKAWA XU-RC400M-A00 Robots
Plasma flood gun, 12"
CTI IS8 Cryo pump system
(2) CTI IS250 Cryo pump systems
(2) BUSCH BC100 Rough pumps
(2) CTI IS 320 Cryo pump systems
6-position gas box
2007 vintage.
AXCELIS Optima MD is an advanced ion implanter and monitor equipment manufactured by AXCELIS Technologies. The system is used by semiconductor plants for etching and doping small semiconductor devices. It is designed for high yield, low cost of ownership with a high degree of throughput. Optima MD is powered by an MSX controller operating an Intel Core i7 processor with 16 GB of memory. Its main components include an automated wafer handling unit with optimized throughput, a motorized wafer transfer arm, a beam approach assembly, and an automated beam steering capability. It is highly efficient and can achieve speeds up to 90 WPH. AXCELIS Optima MD is also equipped with a powerful ion implanter capable of delivering targeted peak dosages of up to 6 x 10^15 ions/cm2. A very efficient electronic feeder machine helps to maintain a high accuracy dosages giving a very reproducible process. It is also capable of delivering different ion energies without the need for separate/dual ion source systems. Optima MD also has a powerful real-time monitoring tool. It can detect any anomalies or unexpected events, providing users with vital data and warnings. The process data can be stored in a FTP file for future examination and analysis. In addition, AXCELIS Optima MD has a unique three-dimensional beam profile capability. This allows users to view the actual beam profile and adjust the beam alignment accordingly to achieve ideal process results. The integrated process analysis software helps identify the processes quickly and reduce product variation. Optima MD is a robust and reliable asset that helps minimize downtime. It uses a highly reliable vacuum model for fast implanting cycles, reducing product downtime. The equipment also utilizes a low-power, DC-powered ion source to deliver high dose rates. AXCELIS Optima MD is an ideal implanter and monitor system for high yield, cost-effective manufacturing. Its efficient and easy to use interface and powerful yet reliable components make it a worthwhile choice for semiconductor plants.
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