Used EATON / AXCELIS Purion H200 #293799094 for sale

EATON / AXCELIS Purion H200
ID: 293799094
Wafer Size: 12"
High current implanter, 12".
EATON / AXCELIS Purion H200 is a cutting-edge ion implanter and monitor designed for advanced semiconductor manufacturing applications. This complex and sophisticated equipment combines precision ion implantation capabilities with robust monitoring features to ensure optimal performance and reliability in semiconductor production processes. EATON Purion H200 stands out for its high-precision ion beam control, advanced monitoring technologies, and versatile implantation capabilities. At the core of AXCELIS Purion H200 is its ion beam technology, which enables precise and controlled implantation of ions into semiconductor substrates. The system is equipped with a high-energy ion source that produces a focused ion beam with exceptional stability and uniformity. This beam can be precisely accelerated and guided to target specific regions on the wafer surface, allowing for precise ion implantation with sub-micron accuracy. The ion beam can be adjusted in energy, current, and angle to achieve the desired implantation depth and dose, making Purion H200 suitable for a wide range of semiconductor fabrication processes. In addition to its ion implantation capabilities, EATON / AXCELIS Purion H200 features advanced monitoring technologies that ensure process integrity and consistency. The unit is equipped with real-time monitoring sensors that provide feedback on key process parameters, such as ion beam current, energy, and uniformity. These monitoring capabilities enable operators to make real-time adjustments to the implantation process to maintain optimal performance and yield. EATON Purion H200 also includes automated calibration procedures and self-diagnostic tools that enhance machine reliability and minimize downtime. AXCELIS Purion H200 offers a high degree of flexibility and scalability, making it suitable for a variety of semiconductor manufacturing applications. The tool can accommodate a wide range of wafer sizes and materials, from small research samples to large production wafers. It supports multiple ion species, including common dopants such as boron, phosphorus, and arsenic, as well as specialty ions for customized processes. Purion H200 can be configured with different ion implantation modes, such as spot beam or raster scan, to accommodate various implantation requirements and substrate geometries. In terms of performance, EATON / AXCELIS Purion H200 delivers exceptional ion implantation accuracy and repeatability, thanks to its advanced beam control and monitoring technologies. The asset can achieve precise implantation doses ranging from a few atoms to high doses exceeding 1E16 cm-2, with excellent uniformity and dose control across the wafer surface. EATON Purion H200 also offers fast implantation throughput, allowing for high-volume production with minimal cycle times. Overall, AXCELIS Purion H200 sets a new standard for ion implantation and monitoring systems in semiconductor manufacturing. Its combination of precision ion beam control, advanced monitoring capabilities, and versatility make it an ideal choice for cutting-edge semiconductor fabrication processes. With its exceptional performance, reliability, and flexibility, Purion H200 is well-suited for leading-edge semiconductor foundries, research institutions, and integrated device manufacturers seeking to achieve superior device performance and yield.
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