Used INTEVAC ENERGi #9411209 for sale

INTEVAC ENERGi
ID: 9411209
Vintage: 2015
Implanter Gas abatement Dopant cylinder housing cabinet Vacuum pump: 2-Stages 2015 vintage.
INTEVAC ENERGi is a revolutionary ion implanter and monitor that is designed to increase the efficiency, speed and accuracy of various ion-implantation applications. It is based on Ion Research Technology, Inc.'s (IRT) patented "Smart Grid" ion optics system. This technology offers superior implantation performance, resolution and precision for precision ion implantation. ENERGi utilizes an advanced scanning system to magnetically steer ions accurately across the process chamber. This system provides a wide range of applications for implantation for electron-degenerative processing. Using ion optics, the Smart Grid is designed to reduce increases in ion beam current and the dose and energy distribution due to the process. It's able to accurately control the geometry and positioning of ions through the process, meaning the beam is only charged when necessary. INTEVAC ENERGi also includes a real-time, fully-automated ion beam monitor. This monitor uses innovative technology to measure and monitor the beam current, beam position, dose and energy distribution of the ion beams in the process chamber. The data it provides allows the user to make precise adjustments to the ion beam without interruption of the process. In addition to its advanced ion implanter and monitor, ENERGi includes an integrated software package to manage the implantation process. This software makes the process easier and faster to use by providing real-time analysis of the implantation process and the beams. It also allows for data logging and plotting of dose and energy distributions for further analysis by the user. In conclusion, INTEVAC ENERGi provides a powerful, efficient and accurate ion implanter and monitor for precision ion implantation. It has been designed to increase the speed and accuracy of the process by providing a secure and precise control over the beam current, beam position, dose and energy distributions. ENERGi also includes an integrated software package to manage the implantation process and real-time analysis of the results.
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