Used INTEVAC Matrix #9294239 for sale
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ID: 9294239
Implanter
Sequential pattern implant system:
Roughing pump
DI Chiller
Electrical power distribution
Implant source chamber
Energy system
Chamber exhaust:
Toxic exhausts from implant chamber roughing pump
Safety interlock
Gas box panel cover
Minimum differential pressure
Gas over pressure
Chamber vacuum
Module:
FORTIX Wafer loader and unloader
Wafer receiving station
Wafer buffer
Load lock chamber
Implant chamber
Mask and alignment
Peripheral:
Pump
DI Chiller
Power Distribution Unit (PDU).
INTEVAC Matrix is an ion implanter and monitor equipment that is used worldwide in a variety of applications. The system is used for precision, high-speed implantation of ions in thin-film and semiconductor devices. It is also used for general-purpose material modification and thin-film analysis. The unit is based on a principle of charged particle acceleration and implanted ions are preciously controlled. This is accomplished by focusing and accelerating the ions to a target material where it is stopped and implanted. The beam of ions is precisely shaped and monitored to reduce the rastering time over the target and provide high quality results. The machine is also equipped with an advanced automatic beam-focusing unit that ensures uniformity of the beam over the entire target area. It is able to perform implantations on quarter-micron features and is also compatible with most chamber systems and wafer sizes. The tool is also equipped with advanced diagnostics capabilities, allowing for process and dose control as well as material profiling. Matrix has a sophisticated graphical user interface which provides easy operation and enhanced device accuracy. It also includes an in-line dosimetry feature that allows the user to evaluate the dose deposition on the wafer being processed in real time. In addition, the asset is capable of temperature and pressure monitoring, allowing for improved process stability. The model provides unbeatable precision in implantation and has been used for production as well as research. It has a wide range of applications such as for doping of semiconductors, converting crystalline substances, or implanting dopants into metals. It can be used for many different materials, including silicon, germanium, gallium arsenide, and titanium. INTEVAC Matrix is an invaluable tool for those in the semiconductor industry. It provides a reliable method for implanting while also allowing for impeccable precision and accuracy.
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