Used NISSIN Exceed 2000A #293775733 for sale
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ID: 293775733
Vintage: 1999
Ion implanter
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SHMADZU Turbo molecular pump
Chiller
Gases: Boron trifluoride, Arsine, Phosphine
1999 vintage.
NISSIN Exceed 2000A is a high-performance ion implanter and monitor equipment designed to provide precise and reliable ion implantation processes for a wide range of applications in the semiconductor industry. This advanced system offers a comprehensive set of features and capabilities that enable users to achieve superior implantation results with maximum efficiency and accuracy. NISSIN EXCEED 2000 A is equipped with a versatile ion source that can generate a variety of ion species, including boron, phosphorus, arsenic, and other dopants commonly used in semiconductor manufacturing. The ion source can be easily configured to meet the specific requirements of different implantation processes, allowing users to achieve precise control over ion beam characteristics such as energy, current density, and dose. One of the key strengths of Exceed 2000A is its advanced beamline design, which ensures optimal ion beam transport and focusing throughout the implantation process. The unit features a series of electrostatic and magnetic lenses that help to minimize beam divergence and maintain high beam quality, resulting in uniform implantation across the entire target surface. Additionally, the machine's beamline is equipped with sophisticated diagnostic tools that enable real-time monitoring of beam parameters, allowing users to quickly identify and correct any deviations from the desired implantation conditions. In terms of implantation control and automation, EXCEED 2000 A offers a highly intuitive user interface that provides easy access to a wide range of process parameters and operating settings. The tool's software allows users to create customized implantation recipes with precise control over implantation depth, dose distribution, and implantation angle, ensuring optimal device performance and yield. Furthermore, the asset's automation capabilities enable seamless integration with other process equipment, such as mask aligners and wafer handlers, to streamline the overall manufacturing process and improve throughput. For process monitoring and characterization, NISSIN Exceed 2000A features a comprehensive suite of in-situ metrology tools that allow users to evaluate and optimize implantation results in real time. These tools include secondary ion mass spectrometry (SIMS), Rutherford backscattering spectroscopy (RBS), and sheet resistance measurement capabilities, which enable users to assess dopant distribution, depth profiles, and electrical properties of implanted wafers with high precision and accuracy. By providing detailed process feedback and analysis, these metrology tools help users to fine-tune implantation recipes and achieve the desired device performance characteristics. Overall, NISSIN EXCEED 2000 A represents a state-of-the-art ion implanter and monitor model that combines advanced technology, precision control, and automated operation to deliver superior implantation results for semiconductor manufacturing. With its versatile ion source, advanced beamline design, intuitive user interface, and comprehensive process monitoring capabilities, Exceed 2000A offers a complete solution for high-performance ion implantation processes in a wide range of semiconductor applications.
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