Used NISSIN NH-20SR #293637187 for sale
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ID: 293637187
Wafer Size: 8"
Vintage: 1998
Medium current implanter, 8"
Chamber
1998 vintage.
NISSIN NH-20SR is an ion implantation and monitoring equipment developed by Japanese manufacturer NISSIN Electric Works. It is equipped with a high-accuracy ion source and has a maximum beam current capacity of up to 20mA. The system is composed of a multi-pleated RF ion sources, an ion beam extension tube, a double-displacement beam line, a hi-mass beam line unit for high-energy implantation, an X-Y scan unit, a high-voltage multi-channel power supply, a digital-input controller, and a high-sensitivity digital display monitor. NISSIN NH 20SR is ideal for ion implantation, reactive ion etching and ion implantation and acceleration sequential process applications. It is capable of implanting various ions such as B, He, P, Si, As, and Cs at different energies ranging from low to high. The unit offers an extremely wide range of power supply voltage, up to 60 KV, with a high capability of beam current adjustability. The multiple beam output allows for high precision implantation adjustment. NH-20SR is a user-friendly, tabletop implanter with a unique ergonomic design, offering easy handling and less maintenance. It can effectively monitor the implant process and results in real-time, with a Digital Read Out Monitor displaying the beam current and implantation dose rate. NH 20SR can be used for research and for fabricating double-junction Solar cells, Transistors and MEMS devices. The machine is equipped with an embedded 3-step high accuracy radial magnet field which can guide the ion beam to be implanted in the thin substrate in a precise manner. It operates at low noise level and has a high collecting efficiency, allowing for reduced damage on the substrate and high yields. Another notable feature of NISSIN NH-20SR is its self-monitoring tool, which allows immediately detecting any beam current/voltage fluctuation outside preset range and help prevent device fabrication failure. Due to its advanced features and operational reliability, NISSIN NH 20SR is widely utilized in various high-tech industries to produce durable and reliable high-performance devices with high production yields. Its significant cost-effectiveness, compact design, and easy maintenance make it an ideal solution for fabrication plants, research and engineering institutes, and universities.
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