Used SEN / SUMITOMO EATON NOVA NV-GSD-A-80 #293637081 for sale

SEN / SUMITOMO EATON NOVA NV-GSD-A-80 is a high-performance ion implanter and monitor. It is designed to offer optimal process control and features powerful software to ensure the highest implantation accuracy, reproducibly and uniformity. It has a loadlock chamber, with a horizontal axis, to allow loading and unloading of up to 4 wafers with a robotic manipulator. In addition, it is equipped with two independent chambers to achieve both high-energy and low-energy implantation. SEN NV-GSD-A-80 has a 3-axis scan system, comprising of X-, Y- and Z-axes to provide precise beam distribution and dosage control, enabling the implant of ultra-fine patterns with high precision. It is equipped with a movable beam axis, which enables easy adjustment of the beam position for different implantation processes. The scan system is also fitted with a high-temperature heater on which a sample can be mounted and heated up to 1000°C. SUMITOMO EATON NOVA NV-GSD-A-80 is equipped with several monitor systems to ensure that the implantation process is carried out according to specific requirements. This includes a Faraday outlet detector, a Faraday cup sensor, a Quartz crystal microbalance, an ion balance monitor and an X-ray bremsstrahlung radiation. NV-GSD-A-80 also has an advanced software with a user-friendly interface that enables users to control and monitor the implantation process in real-time. The software consists of numerous features such as the ability to set up, monitor and control process parameters, setup and monitor advanced material analysis, access recipe files and recall functions. In conclusion, SEN / SUMITOMO EATON NOVA NV-GSD-A-80 is an advanced ion implanter and monitor that provides state-of-the-art process control and analysing capabilities. The loadlock chamber, 3-axis scan system and multiple monitoring systems, coupled with the controlled software, give users the flexibility to adjust and monitor the implantation process exactly according to their needs.