Used SEN / SUMITOMO EATON NOVA NV-GSD-HE #293603723 for sale

SEN / SUMITOMO EATON NOVA NV-GSD-HE is an ion implanter and monitor manufactured by the sumitomo corporation. It is a costly, high-end, multi-beam ion implanter capable of delivering multiple beam currents up to 2mA (with 2 sets of separated beam sources to achieve high throughput) and maximum energy up to 60keV. This model provides uniform doping distribution and excellent control to allow precise depth and location control over the implant dose. It is equipped with a 6-axis motion control equipment and a scanning beam current monitor that can detect small abnormalities and changes in the beam current. SEN NV GSD-HE implanter features a unique electron gun design with a "multifaceted" mirror system that provides a uniform ion beam profile, a "sector-by-sector" beam-steerer which keeps the beam direction in precise control even when varying the impingement angle and an automated "beam validity checker" which protects from random particles entering the beam-line. With the ion gun's self-stabilizing feature and precise beam line control, these advanced unit parameters enable extremely repeatable processes for precise dose control and precise location control. The implantation process is automated, controlled by a sophisticated real-time computer machine; the software capabilities managing all implant records and program parameters for both operations and maintenance. In addition, the monitoring within the entire process is done by a combination of numerous detectors located within the implant chamber along with external detectors, both interfaced to an advanced computer control tool. Furthermore, the asset includes a dedicated particle accelerator to assure first-rate outcomes with highly stable and uniform beams. With its hexapole ion optics and digital control of beam parameters, the model's ion control method and energy stability is ensured even with the corresponding process requirement changes. To ensure sustainability and to guarantee the highest quality of the implant, SUMITOMO EATON NOVA NV GSD HE ion implanter has been extensively tested and certified by a global industrial consultation board in compliance with international standards. NV GSD HE implanter offers outstanding throughput, high productivity and great precision, due to the advanced computer control equipment with optimal beam alignment and tailored software. It also offers excellent repeatability and operational dependability, granting long term usage, lowered costs per process cycle.