Used SEN / SUMITOMO EATON NOVA NV-GSD-HE #9055205 for sale
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ID: 9055205
High energy ion implanter, 8"
Currently warehoused
Gas: BF3, PH3
2006 vintage.
SEN / SUMITOMO EATON NOVA NV-GSD-HE is a high speed ion implanter and monitor. It is designed to deliver high quality implantation with high throughput for increased productivity. The equipment features a high reliability, stable operation, high resolution digital imaging and advanced low energy implantation technology. It is capable of implanting a wide range of ions, including protons, boron, aluminum and antimony. It is also designed with a highly modular control panel, which allows for easy operation and control of the implantation parameters. The system includes a high performance gun unit which is capable of generating high energy, short pulses of ions. It also includes an automated wafer handling machine which allows for precise and accurate manipulation of implant location and dose on individual wafers. The monitoring tool includes high resolution digital imaging which provides precise control over implantation and packaging. It also includes a high power magnetic lens that is used to focus the ion beam on the desired target. The asset is designed with a wide range of safety features that minimize the potential for equipment damage and reduce the risk of radiation exposure. It features a Barrier model that blocks and absorbs ionized particles to reduce the radiation levels. It also features an Active Purge Equipment that removes any airborne contamination from within the system. The unit is also designed with multiple layers of electronics and mechanical components to ensure reliable operation. SEN NV GSD-HE offers a number of features that make it an ideal choice for a variety of applications. It features a high power implantation rate which can reach up to 6μA/cm2, and the pulse duration ranges from 10-200ns. It is capable of providing high quality implants and high throughput, with production cycle times of 1 second or less. It is also designed with low power consumption and can operate with an efficiency of up to 90%. Overall, SUMITOMO EATON NOVA NV GSD HE is an advanced ion implanter and monitor that is designed to provide high quality implantation and monitor performance. It offers a number of features including a high power implantation rate, pulse duration, low power consumption and safety features that make it an ideal choice for a variety of applications.
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