Used ULVAC IDZ-8801 #154974 for sale

ULVAC IDZ-8801 is an ion implanter and monitor equipment. It is a multi-functional ion implanter that can be used to implant various ions such as boron, phosphorus, arsenic, antimony and aluminium. The system features a large implant chamber with a chamber baffle unit to reduce charge contamination. This allows for highly precise and accurate ion implantation both in terms of thickness uniformity and dose set-ups. It is designed to handle heavy-ion type implants with a range of mass range up to 56 amu. The implanter also features a direct-view optical machine located in the implant chamber that facilitates real-time control of the implant profiles. IDZ-8801 features a built-in monitoring tool which allows real-time measurement of the implant dose, uniformity, and profiles. This asset includes a highly sensitive X-Ray fluorescent detector that measures secondary electrons generated from the ions and a Faraday cup to measure the beam current which is essential for providing accurate dose control. It also provides a visual image of the emitted ion at high magnification for monitoring the implant position performance and relative dose distribution, making sure that the implantation is performed within specification. ULVAC IDZ-8801's advanced PFG (Plasma Focused Ion Gun) optics enable users to modify their implant profile for greater control over their target shape. The model benefits from a low implant angle and computerised blocking equipment which maximizes throughput and increases yield of the service. The ion implanter and monitor system also features an advanced integrated end-of-run monitor which ensures that the implant is placed within specification, optimizing the throughput and yield of the unit. Additionally, IDZ-8801 features an electron glass detector to detect defects. The electron glass detector uses an electron beam to detect defects with high resolution and accuracy. ULVAC IDZ-8801 offers a high degree of flexibility in terms of tape placement and selection of an implant profile thereby providing greater control over the end product. This machine also features a simple software operation for easier machine operation and remote controllability. In addition, the tool provides comprehensive safety features, including safety rails and vacuum interlocks. Furthermore, additional safety features such as alarmed doors and enclosure protections help to ensure the highest level of safety.