Used VARIAN 120XP #9226120 for sale

VARIAN 120XP
ID: 9226120
Wafer Size: 6"
High current ion implanters, 6"
VARIAN 120XP is an ion implanter and monitor designed for maximum performance and accuracy in the semiconductor production environment. This equipment is an advanced version of VARIAN 110XP ion implanter. It can provide uniform and consistent ion implantation by means of two separate vibratory beam systems. VARIAN 120 XP is a reliable and cost effective system that is equipped with two Modular Beam Lines (MBLs) with three accelerators, a scooping platform, two scanning magnets, and integrated RF bias sources. It is capable of implantation speeds up to 1,000 volts per second and can accommodate implants into semiconductor wafers and substrates up to 200 mm in diameter. 120XP has an intuitive operating menu unit and uses integrated microprocessor controls to provide precise and reliable control of the implantation and monitoring systems. The machine is equipped with an automated beam alignment tool and a functional safety asset with warning alarms and interlocks. 120 XP's beam current is monitored in real time to validate energy and current uniformity. The model also provides the necessary external cooling requirements, supply of stabilizing gases, and additional support electronics for improved stability of implantation control. The equipment is designed to give the user maximum flexibility for parametric scans and energy scans of up to 600 concurrent implants. It is also fitted with advanced computer interface and graphic capabilities for automatic analysis and plotting of parametric scan data. In addition, VARIAN 120XP has built-in environmental sensors that enable it to automatically adjust the implantation parameters to respond accurately to environmental changes such as degassing or the presence of contaminants. This saves the user time and effort on the production line. All in all, VARIAN 120 XP is a reliable and cost-effective device that is designed for the highest quality production implants and greater production yields. With its comprehensive design, ease-of-use, and advanced monitoring capabilities, it is bound to become an essential part of any modern production facility.
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