Used VARIAN 160XP #9130946 for sale
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VARIAN 160XP is a high performance ion implanter and monitor that is well-suited for high volume applications within semiconductor fabrication. It utilizes a mixed silicon-nitride beam technology to ensure maximum accuracy and particle control when implanting ions within a wafer substrate. VARIAN 160 XP utilizes a real-time closed-loop beam control system to ensure quality and accuracy during the implantation process. This system monitors beam profile, charge state, beam current, and energy for each individual shot of the wafer, and will alter parameters is necessary to maintain accuracy during the implantation cycle. 160XP can handle sample substrates ranging from 100 to 400mm in diameter, and can be programmed to perform high-throughput implantation processing on multiple substrates simultaneously. Using a medium current implanter, it is capable of delivering beam flux rates up to 4.5x1012 ion/sq cm/sec with precise control and accuracy. Its wide range of beam energy settings allow for implanting of shallow substrates and heavier dopants at the same time. The high efficiency of the beam technology provides significant cost savings, as well as improved beam consistence and reliability. 160 XP also offers a range of monitoring and control components, such as particle imaging, beam current measurement, beam energy monitor, and substrate temperature control. It also features features a digital display for temperature and deceleration voltage readings. In addition, VARIAN 160XP has fail-safe systems to protect against faulty beam control or beam current changes that could cause incorrect implantation results. Overall, VARIAN 160 XP is an advanced ion implanter and monitor that provides accurate, precise and reliable implantation results. It is perfect for volume production applications within semiconductor fabrication, and its monitoring capability ensures accurate results with fewer defects. Thanks to its highly efficient beam technology, 160XP can provide cost savings and improved performance to any production line.
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