Used VARIAN 160XP #9198478 for sale
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ID: 9198478
Wafer Size: 6"
Vintage: 1995
Implanter, 6"
Maximum beam energy: 160kV
Energy range: 10kV–160kV
B+: 5mA
BF2+: 7mA
As+: 10mA
P+: 10mA
Sb+: 5mA
(2) Chambers implant process
Source
Beam-line
End station 1 & 2
Dual faraday system: Flood gun
EFG Charge control system
Modules:
Mechanical module
HEPA Filter flow hood
Remote console
Gas box
End station module
Electrical console
High voltage power supply
Dopant source
Argon (High pressure)
Ion source type:
Solid source: Antimony
(3) Gas sources:
Boron HP
Arsine HP
Phosphine HP
Pumps:
VARIAN Diffusion pump
EDWARDS IQDP80
EDWARDS IQDP40
(4) CT8 Cryopumps
CDA Pressure 100 PSI
N2 Pressure 20 PSI
(4) Toxic needle valve controlled gas systems
Power supply: 208 VAC, 60 kVA
1995 vintage.
VARIAN 160XP is a state-of-the-art ion implantation and monitoring system. It is ideal for complex semiconductor applications and helps in optimizing the quality of a wide range of semiconductor materials. The machine works by sending a flow of positive ions, typically controlled through a fixed accelerator within the system. These ions are then injected into a substrate, typically silicon or germanium, at low energies. The result is a controlled amount of doping within the substrate. With VARIAN 160 XP, it is possible to achieve high levels of doping control, as the acceleration voltage and beam current can be adjusted for each implant. This provides greater control and precision in the implant process. In order to maximize ion implantation efficiency, 160XP is designed to include integrated process diagnostics and monitoring. It features a proprietary beam monitor that provides continuous feedback on the accuracy and performance of the process. This allows users to easily adjust and readjust ion implant beam parameters while their experiment is still in progress, without having to repeat it. In addition to these features, 160 XP has a number of useful tools and software packages for optimizing the process. These include dose rate optimization to ensure optimum implantation rates, automated programming of the beam parameters to maximize the throughput, and advanced software tools for data collection. The system also includes auto-focus capabilities, which enable the user to accurately measure and adjust the focus of the ion beam. Overall, VARIAN 160XP is a state-of-the-art ion implanter and monitor. It is designed for maximum efficiency and accuracy, and features advanced software and control capabilities. It is an ideal and reliable choice for any laboratory working with semiconductor material and in need of controlled doping.
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