Used VARIAN 160XP #96723 for sale
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ID: 96723
High current implanter
Standard Configuration (manual wafer loading)
(Qty 2) Sources
(Qty 2) Vaporizers
Spare defining plate
Spare manipulator
Dry Pump for Source RP Leybold D50
Edwards 200 for E/S
Disk 4" / 6" configured
4" and 6" available (spares)
Implant Monitor Software (150 recipes)
Record of resistivity and particle on request
Gasbox 4 lines / 3 in use (Argon / Boron / Phos)
Warehoused
1985 vintage.
VARIAN 160XP is an ion implanter and monitor that is widely used in the semiconductor industry. VARIAN 160 XP is a highly advanced and reliable implanter that can be used for a variety of applications. It features an advanced pulse-power delivery equipment, which offers excellent control over the beam current and dose, as well as precise dose uniformity. Additionally, 160XP has an automated wobbling system that helps create more uniform layer thicknesses for deposition applications. 160 XP also features a number of safety features, such as an advanced particle detector, a beam-current limiter and a collision-protection unit. This ensures that the machine can operate safely and effectively, even in applications where higher-energy particles are used. VARIAN 160XP is also equipped with a state-of-the-art monitor that tracks beam parameters, current stability and other crucial aspects of the operation, ensuring that the process is as efficient and accurate as possible. This monitor, in combination with the pulse-power delivery machine, allow VARIAN 160 XP to offer unparalleled dose control and precision. 160XP uses advanced ion optics, such as an RF lens or electrostatic deflector, to control the beam profile and direct the ions at the desired target. Its integrated source magnet allows the beam to be steered accurately while its high-resolution imaging tool ensures that only the desired target is being hit. In addition to its many features, 160 XP is also designed with convenience in mind. It is extremely easy to operate and has a straightforward user interface. VARIAN 160XP also features a wide range of diagnostic tools and remote performance monitoring capabilities, all of which further simplify its operation. VARIAN 160 XP is a robust and reliable ion implanter and monitor that offers excellent precision and accuracy. Its advanced features and user-friendly design make it an excellent choice for a variety of deposition and beam applications, and its many safety features ensure that it can be operated with confidence.
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