Used VARIAN 300XP #293829234 for sale
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ID: 293829234
Wafer Size: 5"-6"
Ion implanter, 5"-6"
Wheel
Wafer tilt: 7
Source: Beam
Extraction system: Copper pipe/bellow
Gases: BF3, Ar, PH3
SDS Gas box: High pressure
Maximum implantation energy: 120 Kev
Maximum Extraction voltage: 80 Kev
Cooling water pump
(2) Trays
AMU
Beamline column
Mechanical clamp
8 x 3 Cryo.
VARIAN 300XP is an ion implanter and monitor developed and built by VARIAN, Inc. It is widely used in the semiconductor industry for implanting ions in thin film materials. This ion implanter and monitor is designed to be extremely reliable and accurate. VARIAN 300 XP uses a combination of high voltage and kinetic energy to achieve precise and controlled ion implantation. 300XP accelerates ions to high speeds and injects them into a thin film at a precisely controlled dose and angle. This allows for a smoother and more uniform distribution of the implanted ions, resulting in more reliable and accurate results. 300 XP uses a unique differential pumping technology to vacuum the entire work chamber, creating a clean and consistent environment in which to implant ions. This reduces the risk of contamination and ensures accurate and consistent results. VARIAN 300XP also features an integrated particle detection and acceptance system that allow for immediate and SPC-based end point' rejection of particles during implantation. This gives the user greater control over the implantation process and helps ensure the highest quality results. VARIAN 300 XP also features an automated wafer positioning system that allows for precise wafer positioning and placement. This reduces the time and cost associated with implantation and increases the accuracy of each implantation. 300XP was designed to be easy to use and maintain. This makes it highly efficient and cost effective for a variety of applications. It is capable of producing high quality ion implantation results that meet the most stringent requirements. As a result, it is the most trusted and reliable choice for many semiconductor manufactures.
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