Used VARIAN 350D #293600208 for sale

VARIAN 350D
ID: 293600208
Ion implanter, parts system.
VARIAN 350D is a high-performance ion implanter and monitor designed to deliver precise doses of highly charged ions into semiconductor substrates. It consists of several components, including an ion source, a beamline, a mass spectrometer, a beam deflection system, and a control console. VARIAN 350 D ion source is a heated, high-vacuum-compatible source, capable of delivering ions of various energies and Beam currents. It is powered by an RF generator with adjustable frequency and amplitude, and is equipped with an electron-beam ion source for fine control of the ion flux. The beamline is comprised of a focusing magnet, an accelerated voltage source, and a set of electrostatic deflection plates. The beam is focused by the magnetic field produced by the focusing magnet, which enables fine control of the ion beam's trajectory and energy. The accelerating voltage source provides the energy required to accelerate the ions to their required implant energies. The electrostatic deflection plates are used to deflect the ion beam and steer it towards the desired target substrate. The mass spectrometer is used to measure and monitor the implanted ions. It enables precise control over the ion flux and dose rate, allowing the desired dose to be precisely controlled. It is equipped with a chamber and a set of high impedance detectors which measure the ion species and their respective intensities. 350D is equipped with a beam deflection system consisting of a rotating deflector and an adjustable beam shaping grid. The deflector is used to switch the position of the beam, and the beam shaping grid is used to reduce the beam divergence and control the beam shape. This system allows the ion beam to be precisely positioned with respect to the target substrate. The control console provides an intuitive graphical user interface to enable precise control of the implanting parameter and to monitor the implanting process. It also allows 350 D to be remotely monitored and controlled over the Internet. VARIAN 350D is a powerful, precision ion implanter and monitor, capable of delivering highly precise doses of highly charged ions into substrates. The combination of its components allows complete control over the implanting process, ensuring precise doses of ion species can be implanted into substrates. It is the ideal tool for the fabrication of devices requiring precise control over doping levels.
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