Used VARIAN / AMAT / APPLIED MATERIALS VIISta 80HP #9292219 for sale
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ID: 9292219
Ion implanter
IAN Computer, P/N: E11130730
NCS Computer, P/N: E11083873
End station:
Platform type: UES Buffer, P/N: E11138370
(4) BROOKS AUTOMATION Fixload 6 Loadports
BROOKS AUTOMATION DBM 2706 Buffer robot
(2) BROOKS AUTOMATION VAC-407-2A PRI Robots, P/N: E40001450
Source module:
Gas box, P/N: E11140710
IHC Source head
Manipulator
Part number / Gas stick
E11116732 / Gas1 (Removed)
E11147261 / Gas2
E11147241 / Gas3
E11147251 / Gas4 (Removed)
E11116782 / Gas5
Beamline module:
90° Magnet assembly
Beamgate assembly, P/N: E11084141
Decel lens assembly
70° Magnet assembly
D2 Lens assembly and ES decel
Process chamber module:
Angle cup, P/N: E11127951
Roplat kit
BROOKS AUTOMATION 354019-TD-T Vacuum gauge
(3) MKS 354019-TD-T Vacuum gauges
(2) EDWARD STP-A2203C2 Turbo pumps
(2) EDWARD SCU-1500 Turbo pump controllers
(2) PFEIFFER TMH-261 YPX Turbo pumps
(3) GENESIS ICP 320 LQ Pumps
(2) GENESIS HC80 Cryo pumps
(2) EDWARD IQDP80 / QMB500 Rough pumps
EDWARD IGX100N Rough pump
Main PD assy: Circuit breaker kit
Remote PD CVCF assy
Remote rack
Missing parts:
Controller mass flow, 0-3 SCCM, PH3, 4RA P/N: E23000350
Controller mass flow, N2 calibration 5 SCCM P/N: E23000101
AFFINITY PAA-003B-CE50CBD3 Platen chiller
(2) Manipulator controllers, P/N: E11290090
Advanced platen, P/N: E11368067
Dual PFG power supply controller assembly, P/N: E11092090
Quad lens, P/N: E11289020.
VARIAN / AMAT / APPLIED MATERIALS VIISta 80HP is a high performance computer-controlled ion implanter and monitor designed for research and manufacturing use. It is a reliable equipment for a variety of processing applications including semiconductor ion implantation. AMAT VIISta 80HP model can handle all standard implantation tasks. It is versatile and can planar or vertical or domed engrave. It can handle particles of different shapes and sizes and with high precision. With its high-resolution display, the ion beam can be accurately programmed, tracked, and monitored. VARIAN VIISTA 80 HP features a powerful beam control system that is user-friendly and can be programmed by the user with ease. With its three types of beam manipulation, the beam can be tailored to the specific needs of the processing application. The beam can be deflected, focussed, and the beam power can be adjusted as needed. The unit's high-precision beam monitoring and control machine, including a beam turn-off device (BTO), ensures accurate and even implantation of the target particles. VARIAN VIISta 80HP also features a closed-loop computer-controlled pumping tool that allows for high-vacuum conditions for effective but clean implantation. The temperature control asset ensures a consistent temperature in the implantation chamber for optimum performance. VARIAN / AMAT / APPLIED MATERIALS VIISTA 80 HP offers clean and accurate ion implantation with great precision and control. Its active area monitor gives real-time information about the beam's position and intensity. It also offers precise information about the wafer's surface profile, with its integrated surface profile monitor. Furthermore, other features include a user-friendly graphical user interface, programmable recipes, and data saving and retrieval. VIISTA 80 HP is a reliable and powerful model for implantation-based processing. It offers great control and accuracy with a user-friendly graphical interface and enhanced beam manipulation. With its many features, it is well suited for research and production applications.
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