Used VARIAN / AMAT / APPLIED MATERIALS VIISta 810 #9223170 for sale
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ID: 9223170
Wafer Size: 12"
Vintage: 2001
High energy ion implanters, 12"
(4) Cassettes / (4) FOUP Positions
ASYST 300 OHT Transport, 12"
All Cables included
GEM / SECS Interface
Mid current classic: 810
Bernas source
Dual vaporizer
(7) Programmable tilt angles
Tilter head revision: Type C
EDWARDS iQDP80 Dry pump
EDWARDS iQDP80/500 Dry pump
Dose range: 1e^11 ~ 1e^13
Turbo's:
Dimmer magnet
Source
End station
Cryo's:
(3) Process chambers
Scan chamber
Process gasses:
Gas 1: HP
Gas 2: SDS
Gas 3: SDS
Gas 4: SDS
Does not include:
Chiller
Dry pumps
Cryo compressors
Hard Disk Drive (HDD)
Power supply: 270 kV
2001 vintage.
VARIAN / AMAT / APPLIED MATERIALS VIISta 810 is an advanced ion implanter and monitor specifically designed to provide improved performance and precise control for a wide range of processing needs. The equipment integrates a high-resolution, high-performance electron multiplier, which is capable of measuring the implant energy in real time to ensure uniformity and accuracy for every implant process. AMAT VIISta 810 also utilizes a patented end station control system (ESCS). This allows for precise and consistent control of the implant and monitor parameters during any process, ensuring that only the preset parameters are used. In addition, VARIAN VIISta 810 provides an integrated unit for monitoring the implantation process. The built-in diagnostics machine allows the operator to continuously monitor the implant process and make required adjustments as needed. This monitoring tool allows for the calibration of the anode current and implant energies. The hysteresis monitor of APPLIED MATERIALS VIISta 810 also allows for better control of the sample environment. This automated asset monitors the implant energy and dose at the point-of-implant step so that any significant deviations from preset parameters can be quickly responded to. VIISta 810 also offers a variety of accessibility options. With the optional remote console, the user can monitor and control the implant process from a different location. Additionally, there is an Ethernet port for online connectivity so multiple users can monitor the implant process from different computers. The model also comes with built-in safety features. The safety interlocks detect current overloads and unsafe voltages, preventing hazardous operations. Furthermore, VARIAN / AMAT / APPLIED MATERIALS VIISta 810 meets all latest standards to ensure a high level of safety on the premises. In conclusion, AMAT VIISta 810 is an advanced ion implanter and monitor specifically designed for improved performance and precise control. The intuitive controls and built-in safety features make it an ideal choice for a wide range of processing needs.
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