Used VARIAN / AMAT / APPLIED MATERIALS VIISta HC #293815847 for sale
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ID: 293815847
Wafer Size: 12"
High Current Ion Implanter, 12"
(4) Depodders
Linear track
BROOKS AUTOMATION DBM‑series Robot
Robot controller
Missing parts:
(1) Extraction PS
(1) SEIKO Turbo pump controller
(1) Source turbo pump
(1) Beamline turbo pump
(3) ENDSTATION Cryo pumps.
VARIAN / AMAT / APPLIED MATERIALS VIISta HC is an ion implanter and monitor designed to provide excellent process control and high productivity in semiconductor device fabrication. The equipment's advanced capabilities are housed within a single chamber and controlled by a user-friendly interface. The system's ion implanter section consists of a large, cylindrical high-energy accelerator with an adjustable opening angle that can be set to a range of different values to adjust the angular spread of the ions. This allows for a variety of implantation selectivity options, such as high-angle and broad-area implants. The unit also has a high-precision, 10-axis feedthrough that can be positioned with micron-level accuracy, allowing for precise control of the ion beam's position, size and shape. The machine's monitor section features a multi-detector set-up, which can measure a range of parameters including implanter beam current and energy, flux density, high-angle scattering, and angle spread. This allows for continuous quality control of the implantation process and minimizes the risk of device failures. The tool is also equipped with several safety features, such as emergency stop and shield protection, to prevent exposure to high-energy radiation and minimize the risk of injury while operating the asset. It also contains a sophisticated model of optical and electrical diagnostics to monitor the ion beam's properties and ensure optimum performance. In addition, AMAT VIISta HC is designed for easy integration into existing production lines, with options for connection to peripheral components, such as plasma or etching systems. This provides a great degree of flexibility and ensures reliable operation of the entire production line. Overall, VARIAN VIISta HC is a powerful and reliable implanter and monitor, capable of providing superb process control and high productivity in semiconductor device fabrication.
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