Used VARIAN E1000 #158481 for sale
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ID: 158481
Implanter Facilities Module
Includes:
(3) Varian 113524002
NWI Transformer 35146
Primary: 65 KVA, 400 V, 81.6 A, 3Ph
Secondary: 35/23/7 KVA, 208 V, 97/64/19
Wallis Hivolt A1006170 E112240001
Missing parts
As is.
VARIAN E1000 is an advanced ion implanter and ion monitor. It was developed by VARIAN Semiconductor Equipment Associates, Inc., a manufacturer of ion implantation systems. VARIAN E-1000 utilizes a high-precision single-axis motor-controller and a cold-aged motor spindle to drive implantation power and accuracy. The combination of the motor-controller and motor spindle provide continuous control of dose rate and peak voltage. E 1000 utilizes advanced diagnostic sensors to ensure peak voltage accuracy and detect any potential arcing or other electrical errors. Such errors can cause significant damage to the wafers or film used in ion injection processes. The sensors also monitor the charge transfer of the accelerator and range lock. This allows for maximum utilization of the accelerator. In addition, E-1000 utilizes a precision weigh-in-motion feedback loop for beam alignment, allowing for accurate implantation. E1000 also features a pentode ion source. The source produces a high-intensity negative ion beam, with strong stability and repeatability. This ensures uniform implantation of ions. A hyperfine beam selector is also included to protect wafers from being bombarded with too many ions. VARIAN E 1000 is highly reliable and efficient, with a high production rate, low cost per shot, and versatility in application. The ion implanter can be configured to handle different types of substrates, and the automated equipment can be modified to accommodate different layers of films or substrates. In addition, its flexibility in applications can save time and money significantly compared to traditional single-stage applications. VARIAN E1000 also features an advanced control system. This unit includes a workstation computer and integrated software, which allow for easy customization, as well as real-time monitoring and control. The user-friendly interface allows for convenient operation, while the integrated software allows for ease of data acquisition. Overall, VARIAN E-1000 is an advanced and reliable ion implanter and ion monitor. Its precision-developed hardware and software offer a reliable and efficient solution for ion implantation. The integrated control machine makes operation simple and efficient, allowing for a smooth and consistent operation.
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