Used VARIAN E1000 #9214217 for sale
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ID: 9214217
Vintage: 1994
High current implanter
Chamber cryo pump: CT-250F
Source dry pump: QDP80
Beam-line turbo pump: LEYBOLD
L/L Rough pump: QDP80 + QMB250
L/L Turbo pump: VARIAN 300HT
Station: Bell jar
Scrubber: VECTOR TECHNOLOGIES
Process gas: BF3, PH3, ASH3
Power: 380 VAC, 3 Phase, 4 Wires, 55 kVA
1994 vintage.
VARIAN E1000 is an ion implanter and monitor designed and manufactured by VARIAN Semiconductor Equipment Associates (VSEA). It is an electrostatic accelerator, capable of implanting ions of a variety of materials into flat or curved substrates, such as wafers. The device has been designed to provide an accurate, reliable, and cost-effective method of controlling an ion implantation process. VARIAN E-1000 consists of two main components: the ion source and the ion beam monitor. The ion source is composed of a diaphragm-less ion source which is capable of producing high intensity, low-energy beams. The device is equipped with a variable current that allows for varying beam currents and ion energies, allowing for precise control of the implantation process. The ion beam monitor is a quadrupole mass spectrometer that measures the ion beam flux and energy, as well as providing feedback for process control. In addition to these components, E 1000 has a variety of other functionalities designed to improve process performance. These include a beam kill switch, voltage stability monitors, and a beam current feedback system to allow for consistent ion implantation. Furthermore, the device is highly automated, allowing for unattended operation and integration into automated production systems. In terms of implications, VARIAN E 1000 greatly improves the accuracy and reliability of ion implantation processes. It is ideal for use in semiconductor fabrication, providing precise control of implantation that would otherwise be difficult to achieve. Utilizing the device, implantation processes can be performed without the need for manual intervention, greatly reducing operational costs. Furthermore, the device is also capable of detecting contamination and other impurities in the implantation process, allowing for better quality control. Overall, E1000 is an advanced, reliable ion implanter and monitor. It provides a simple, cost-effective, and accurate method of controlling implantation processes, allowing production to become more efficient and reliable. This device is ideal for use in semiconductor manufacturing, and will likely continue to become an essential part of the industry.
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