Used VARIAN E11001040 #9211648 for sale
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VARIAN E11001040 is a state-of-the-art ion implanter and monitor, providing excellent, high-precision ion beam technology for processing semiconductor wafers. It is one of the most advanced implanters on the market, with exceptional accuracy and reliability. To support its high-performance operation, the device includes several cutting-edge components. A high-energy beam line ensures optimal beam energy delivery for implanting the desired ions. The motorized step scan system allows for precise repeatable scans of optimized transepts to ensure uniform implants. Additionally, the implanted beam can be directed through the use of deflectors and slits. This makes the device suitable for wide-area and local area implants such as shallow junctions in semiconductor materials. In addition, the device features a computer-controlled processor for optimizing dose delivery. The controller offers a number of adjustable parameters to control the dose amount during a process cycle. It can also be used to evaluate process results on a wafer-by-wafer basis. Additionally, the operator can adjust parameters such as beam current, energy, and scan speed in real-time. This allows for rapid optimization of the process and improved production yields. For monitoring, E11001040 includes one of the most advanced end-point detection systems on the market. This system provides precise, reliable end-point detection to ensure accurate implants throughout the cycle. Additionally, the device includes several chamber diagnostics, such as mass spectrometry, infrared and visible light spectroscopy, and beam fan analysis. These diagnostics allow for precise monitoring of the implant process, with immediate feedback for corrective action if needed. All of these features combined ensure excellent quality implants with minimal waste and maximum efficiency. The advanced computer controls and diagnostics enable precise control of the implant process, resulting in uniform products without defects. Additionally, the high-quality components and reliable design provide long-term, trouble-free performance, saving time and money in the long run.
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