Used VARIAN E19013590 #9070880 for sale
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VARIAN E19013590 is an ion implanter and monitor used for semiconductor device fabrication. It is widely used in the semiconductor industry because of its high accuracy, reliable performance, and low cost of operation. It is known for its ability to implant dopants with high depth control. E19013590 equipment comprises of an ion implanter, a beam decelerator, a monitor chamber, and a set of manipulators. The ion implanter is a high-current, low-energy, variable-energy ion implanter. It is able to implant dopants at adjustable depths, from a few hundred angstroms to a few thousand angstroms. The beam decelerator is used to slow down the ions from the ion implanter so that more impressive control is available even at lower energy. The monitor chamber allows the conditioned ions to be measured during operation, so that process conditions can be adjusted if desired. VARIAN E19013590 comes with precision manipulators which enable precise control of the wafer during implantation. It also has an optional electrostatic chuck to provide additional protection and positional accuracy. The system is capable of providing uniform dose distribution and excellent depth control. The dose rate is adjustable, ranging from 0.5 to 50 dpa/s. The unit is equipped with a wide range of vacuum and safety interlocks, as well as an advanced diagnostic monitoring machine. It can monitor all components in the tool at all times so that potential dangers can be identified and avoided. In addition, this asset comes with a variety of accessories, such as various sources, shutters, and electrode assemblies. It also provides a direct interface to connected gas sources, allowing for rapid source changes. The model can be tuned remotely, with all the necessary adjustments being made through the computer. Overall, E19013590 ion implanter and monitor provides accurate, reliable, and economical semiconductor device fabrication. It is equipped with a range of safety interlocks and diagnostic monitoring, and its sophisticated accessories make it a powerful tool for implantation.
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