Used VARIAN E220 EHPI #293752730 for sale
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ID: 293752730
Wafer Size: 8"
Vintage: 2001
Ion implanter, 8"
Load lock: Left to right
Lamp colours: Red, Orange, Green
Heat exchange chiller
DI Cart: EHPI, B-Pure filter
Chamber A (DPN): Aluminum material
Gas box:
4-Sicks
HP
SDS2
Load lock / Cassette:
Cassette stage, 8"
(2) Chambers
Missing parts:
TPLM Board
Platen
UPS: CVCS
Power supply: 208 V, 3-Phase, 50/60 Hz
2001 vintage.
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