Used VARIAN E500 HP #9230820 for sale

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ID: 9230820
Vintage: 1996
Medium current ion implanter Process gases : BF3, PH3, AsH3 Scrubber: Vector technology Chamber cryo pump: 250F Beamline turbo pump: STP-1000C Beamline dry pump: DPA-943492 Beamline turbo pump: STP-1000C L/L Cryo pump: 100 Cryo pump 9600 Compressor Power supply: 208 VAC, 3 Phase, 5 Wires, 42.3 kVA 1996 vintage.
VARIAN E500 HP is a high-end ion implanter and monitor. It is used for implanting and/or monitoring ions into semiconductor materials for the fabrication of electronic components. VARIAN E500HP offers high performance precision in the form of a 100kV energy resolution, along with highly reliable stabilization of the dose rate output, allowing for superior implantation processes. The built-in HP monitor also provides analysis and tracking of parameters that positively influence the implantation process, such as dose rate, energy spread, and specularity of generated ions. E-500HP provides users with a wide variety of options, allowing users to tailor the equipment to meet specific needs. The integrated automated control system allows users to customize the unit to achieve the most optimal implant parameters, even in extreme operating conditions. This machine offers easy-to-learn and intuitive graphic-driven user interface tools, along with an intuitive tree view data display, which allow for more effective implantation analyses. VARIAN E 500 HP offers a choice of beam source powers for optimal implant control, including a single-axis, dual-axis, and 4-axis beam sources. Advanced thermal management technology helps users maximize the potential of the controlled beam source, while ensuring consistent beam power levels. The optional particle transport tool offers reliable and repeatable yield for high-throughput production of semiconductor components. It also allows for improved implant compliance with industry standards. E 500 HP is equipped with a fully automatic in-situ endpoint detection asset. This model is designed to detect the end of an implant process with a high degree of accuracy. This equipment ensures that all components implanted with VARIAN E-500 HP are consistently delivered with the highest quality and reliability standards. Along with the high performance of the unit itself, users can also take advantage of a range of accessories that are designed to maximize productivity. This includes wafer handling robots for automated loading and unloading of wafers, that increase throughput and eliminate manual handling of wafers. Other accessories include jigs for precision placement of wafers within the chamber, and locking systems to ensure proper process execution. E500HP provides users with an advanced ion implantation system. With its easy-to-use interface, intuitive tree display, automated control, and reliable in-situ endpoint detection, this unit offers a cost-effective and reliable method of precision ion implantation and monitoring. Combined with a full range of accessories, VARIAN E-500HP offers a wide range of options to ensure an optimal implantation process.
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