Used VARIAN E500 #9206611 for sale

ID: 9206611
Vintage: 1993
Medium current ion implanter, 6" Signal tower: Front panel Platen type: M-clamp Loadlock: Left, right No CVCF Option System vacuum: Ion source chamber Beamline chamber End station chamber Pumps: Terminal: Dry pump Turbo pump & (3) controllers E/S Chamber: Dry pump Dry pump / Booster pump Cryo pump L/L Cryo Maker / Model / Class EDWARDS / QDP80 / Terminal dry PFEIFFER / TPH 1600 / Source TMP PFEIFFER / TCP 5000 / Source TMPC PFEIFFER / TPH 510 / Resol TMP PFEIFFER / TCP 310 / Resol TMPC PFEIFFER / TPH 240 / Beamline TMP PFEIFFER / TCP 121 / Beamline TMPC CTI / 250 / Endstation C/P CTI / 8500 / Compressor VARIAN / CTI100 / Loadlock TMP VARIAN / CTI100 / Loadlock TMPC EDWARDS / 5020+boost / End station dry Process gas: AsH3: HP Type, VCR 1/2" PH3: HP Type, VCR 1/2" BF3: HP Type, VCR 3/8" Ar(N2): HP Type, CGA 580 (Non gas line) High voltage range: Extraction power supply: 0 keV~70 keV Acceleration power supply: 0 keV ~ 180 keV Power supplies: Arc: 300VDC, 15A Filament: 7.5VDC, 200A Source magnet: 20V, 50A Extraction: 70kV (Max:75kV), 50mA Extraction suppression: -2kV, 50mA Analyzer magnet: 40V, 125A (Max:150A) Mirror power supply (decel): 30kV, 2.5mA Quadrupole magnet #1: 20V, 50A Quadrupole magnet #2: 20V, 50A Scan generator controller: -30kV, 10mA Mirror: 60kV, 1.2mA Dipole lens magnet: 40V, 125A (Max:150A) Acceleration: 180kV, 5mA (-> 8mA) Acceleration suppression: -5 kV, 5 mA Scan trek power supply: 30 kV Isolation transformer assy: 70 kV Controller (Assembly): Left arm servo Right arm servo Vacuum gauge Scan faraday Platen tilt servo Vertical lift orienter Uniformity Liner motor servo amp Orienter Left elevator Right elevator Dose integrator DI Temp monitor Options: No beam energy probe No 2 step beam reduser No auto deceleration Gas box type: HP Source type: Bernas Faraday type: VARIAN Scanning faraday Utilities: Air: 100~150 psi N2: 40~150 psi Cooling water: 60~150 psi Temperature: 4~21°C Power: 208VAC, 3-Phase, 5 Wires, 43.2kVA, 120FLA 1993 vintage.
VARIAN E500 is an ion implanter and monitor designed for use in semiconductor device fabrication, plasma etch, and ion implantation processes. It is a versatile tool for achieving device level control as well as high energy implantation applications. Additionally, VARIAN E 500 offers a range of process and control capabilities, allowing it to be used in a variety of different types of implantation processes. The system utilizes a patented triple-junction design to accurately direct ions for implantation. It is equipped with a dual-axis stage design for precise positioning of the sample being implanted. This is achieved using a mechanical encoder and an on-board computer, allowing the machine to accurately locate samples in the appropriate region for implantation. E-500 is capable of implantation of arsenic, boron, phosphorus, and antimony. It can also be used for implanting phosphorus in high-energy implanted structures. E500 is capable of providing a wide range of dosages so that manufacturers can set implantation parameters for all species and can track a wide range of data. It is specially designed to monitor the implantation process and has the ability to detect any malfunctions or imperfections in the sample. This helps avoid possible damage that would otherwise cause irreversible damage to the finished product. It is also able to monitor the temperatures within the chamber during each implantation cycle and adjust accordingly if necessary. VARIAN E-500 is equipped with an innovative remote access feature so that users can monitor the system from anywhere. This feature is useful for those who are unable to physically be at the machine during implantations. Through this feature, manual input can be done remotely and the data collected during the implantation process can be accessed remotely. Overall, E 500 is a powerful and reliable implantation and control tool for high energy established and established processes. It offers a wide range of processes and control capabilities as well as a remote access feature which makes monitoring and adjusting implantation parameters easier. This makes VARIAN E500 an ideal tool for semiconductor device fabrication, plasma etch, and ion implantation processes.
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