Used VARIAN E500 #9206611 for sale
URL successfully copied!
Tap to zoom
ID: 9206611
Vintage: 1993
Medium current ion implanter, 6"
Signal tower: Front panel
Platen type: M-clamp
Loadlock: Left, right
No CVCF Option
System vacuum:
Ion source chamber
Beamline chamber
End station chamber
Pumps:
Terminal:
Dry pump
Turbo pump & (3) controllers
E/S Chamber:
Dry pump
Dry pump / Booster pump
Cryo pump
L/L Cryo
Maker / Model / Class
EDWARDS / QDP80 / Terminal dry
PFEIFFER / TPH 1600 / Source TMP
PFEIFFER / TCP 5000 / Source TMPC
PFEIFFER / TPH 510 / Resol TMP
PFEIFFER / TCP 310 / Resol TMPC
PFEIFFER / TPH 240 / Beamline TMP
PFEIFFER / TCP 121 / Beamline TMPC
CTI / 250 / Endstation C/P
CTI / 8500 / Compressor
VARIAN / CTI100 / Loadlock TMP
VARIAN / CTI100 / Loadlock TMPC
EDWARDS / 5020+boost / End station dry
Process gas:
AsH3: HP Type, VCR 1/2"
PH3: HP Type, VCR 1/2"
BF3: HP Type, VCR 3/8"
Ar(N2): HP Type, CGA 580 (Non gas line)
High voltage range:
Extraction power supply: 0 keV~70 keV
Acceleration power supply: 0 keV ~ 180 keV
Power supplies:
Arc: 300VDC, 15A
Filament: 7.5VDC, 200A
Source magnet: 20V, 50A
Extraction: 70kV (Max:75kV), 50mA
Extraction suppression: -2kV, 50mA
Analyzer magnet: 40V, 125A (Max:150A)
Mirror power supply (decel): 30kV, 2.5mA
Quadrupole magnet #1: 20V, 50A
Quadrupole magnet #2: 20V, 50A
Scan generator controller: -30kV, 10mA
Mirror: 60kV, 1.2mA
Dipole lens magnet: 40V, 125A (Max:150A)
Acceleration: 180kV, 5mA (-> 8mA)
Acceleration suppression: -5 kV, 5 mA
Scan trek power supply: 30 kV
Isolation transformer assy: 70 kV
Controller (Assembly):
Left arm servo
Right arm servo
Vacuum gauge
Scan faraday
Platen tilt servo
Vertical lift orienter
Uniformity
Liner motor servo amp
Orienter
Left elevator
Right elevator
Dose integrator
DI Temp monitor
Options:
No beam energy probe
No 2 step beam reduser
No auto deceleration
Gas box type: HP
Source type: Bernas
Faraday type: VARIAN Scanning faraday
Utilities:
Air: 100~150 psi
N2: 40~150 psi
Cooling water: 60~150 psi
Temperature: 4~21°C
Power: 208VAC, 3-Phase, 5 Wires, 43.2kVA, 120FLA
1993 vintage.
VARIAN E500 is an ion implanter and monitor designed for use in semiconductor device fabrication, plasma etch, and ion implantation processes. It is a versatile tool for achieving device level control as well as high energy implantation applications. Additionally, VARIAN E 500 offers a range of process and control capabilities, allowing it to be used in a variety of different types of implantation processes. The system utilizes a patented triple-junction design to accurately direct ions for implantation. It is equipped with a dual-axis stage design for precise positioning of the sample being implanted. This is achieved using a mechanical encoder and an on-board computer, allowing the machine to accurately locate samples in the appropriate region for implantation. E-500 is capable of implantation of arsenic, boron, phosphorus, and antimony. It can also be used for implanting phosphorus in high-energy implanted structures. E500 is capable of providing a wide range of dosages so that manufacturers can set implantation parameters for all species and can track a wide range of data. It is specially designed to monitor the implantation process and has the ability to detect any malfunctions or imperfections in the sample. This helps avoid possible damage that would otherwise cause irreversible damage to the finished product. It is also able to monitor the temperatures within the chamber during each implantation cycle and adjust accordingly if necessary. VARIAN E-500 is equipped with an innovative remote access feature so that users can monitor the system from anywhere. This feature is useful for those who are unable to physically be at the machine during implantations. Through this feature, manual input can be done remotely and the data collected during the implantation process can be accessed remotely. Overall, E 500 is a powerful and reliable implantation and control tool for high energy established and established processes. It offers a wide range of processes and control capabilities as well as a remote access feature which makes monitoring and adjusting implantation parameters easier. This makes VARIAN E500 an ideal tool for semiconductor device fabrication, plasma etch, and ion implantation processes.
There are no reviews yet