Used VARIAN / GENUS G1510 / G1520 #9209301 for sale

GENUS G1510 & G1520 Ion Implanter & Monitor is a state-of-the-art charged particle accelerator used for implanting ions in a variety of materials. This highly modular, computer-controlled system includes both an ion source and a beam monitoring camera, allowing for precise control and accuracy of the ion implantation process. The ion source is a duoplasmatron source which produces ions of various species, including argon, oxygen, phosphorus and silicon. This source enables a wide range of ion energies and beam current strengths, making the G1510 & G1520 suitable for various types of ion implantation, such as energy-adapted implantation or energy-spread implantation, allowing for applications such as RF MEMS or radar-sensitive MEMS. The beam monitoring camera can be used to detect and monitor the ion beam, allowing the operator to confirm desired settings and monitor the implantation process in real-time. The camera can also provide feedback on various beam parameters, such as beam spot size, beam transmission and beam misalignment. This in turn allows for improved operator control of the implantation process, helping to ensure the desired ion dose is achieved. The G1510 & G1520 systems are highly automated, with a built-in operator interface providing easy access to all device parameters and machine functions. The user interface also provides alarm and monitoring functionality, allowing for the system to be remotely monitored and adjusted. Additionally, the built-in calibration module enables automated alignment for each source, ensuring accurate ion implantation for each run. The G1510 & G1520 are available in both open and closed frame designs, allowing for installation in both traditional laboratory and OEM applications. Additionally, the systems are designed to meet a variety of safety and operational standards, such as CE and SEMI 2336. Overall, VARIAN G1510 & G1520 Ion Implanter & Monitor are high performance, highly versatile systems, capable of precise implantation of a variety of ions at various energies. The addition of automated features such as the camera and calibration module further enhances its purpose, offering improved operator control and safety. Its diverse application and range of features make the G1510 & G1520 a highly efficient, reliable and cost-effective solution for implantation applications.