Used VARIAN / GENUS G1510 / G1520 #9209306 for sale

GENUS G1510 and G1520 are advanced ion implanters and monitors designed for use in semiconductor manufacturing. They provide excellent performance and reliability in implanting a wide range of ion implantation processes. The G1510 is a 130 keV dual-ion source implanter and monitor designed for high throughput and repeatable doping rates. It includes an oil-free, ceramic-lined vacuum chamber delivering a high level of vacuum for ion contamination control. The two ion sources, a broad beam and a focused beam, deliver uniform energy distribution, which allows for faster cycle times and better dopant control. The G1520 is a three-source, 120 keV ion implanter and monitor designed to address the needs of high-end semiconductor applications. Its high-resolution photoelectric source provides the flexibility to selectively implant up to three different dopants. This allows for the optimization of the implant dose and energy. Additionally, the G1520 provides superb stability and accuracy over a wide range of implant parameters, making it the ideal solution for critical dopant applications. Both the G1510 and G1520 feature an optional computer monitoring system that allows users to manage and record implant parameters on a computer. This system also supports remote control and monitoring of implant processes over a secure network. In addition to providing excellent ion implantation capabilities, both the G1510 and G1520 offer various process options, such as custom implant windows, dual energy implantation, variable-time implants, and delta-dosimetry. This allows users to tailor the implant process to their particular application needs. The G1510 and G1520 also offer one of the most comprehensive safety packages on the market. Both machines are equipped with a safety interlock switch that will disable the system when the safety cover is opened, and are compliant to safety standards EN 291, EN292, and EN 60204. Overall, VARIAN G1510 and G1520 are advanced ion implanters and monitors that provide excellent performance and reliability for a wide range of semiconductor manufacturing applications.