Used VARIAN VIISion 80 #9065690 for sale
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ID: 9065690
High current ion implanter, 8"
Enhanced End Station
Includes:
Software version: Ver 5.00.00
Gas box: HP Gas box
Turbo pump:
Ion source (1800A)
E/S: V300HT
(2) Beamline: V1001
Dry pump:
Terminal: Edwards iQDP80
Chamber: iQDP80
Gas bottle #1: Ph3 - SDS
Gas bottle #2: AsH3 - SDS
Gas bottle #3: BF3 - High pressure
Gas bottle #4: Ar - High pressure
W/H: N6
Software: Memory upgrade
LEB Kit: Yes
DISC: Hook site
Cryo pump: (4) 250F CTI
Load lock pump: V300HT
Compressor: CTI 8500
Wafer handler: Enhancement type
Main monitor: LCD
Exhaust box: Duct box
Source head: Bernas
Filter +/- 7ª
Exhaust
Signal tower
Currently de-installed and stored in warehouse
1995 vintage.
VARIAN VIISion 80 is a high-performance ion implanter and monitor designed to provide superior results in the fabrication of semiconductor devices. The equipment utilizes an advanced beam system that provides accurate and repeatable dose control. VIISion 80 is capable of implanting ions into silicon wafers with high frequency and accuracy. It includes a wide range of features that allow the user to quickly adjust parameters for a wide variety of processes. VARIAN VIISion 80 is built around a high-resolution imaging unit that provides excellent repeatability and is capable of 6σ accuracy. The imaging machine features a high dynamic range which allows for highly precise ion beam control in various applications. Additionally, the tool is able to perform broad range frequency manipulation for a large variety of semiconductor devices. VIISion 80 features a robust and efficient beam delivery asset, allowing for a wide range of implantation. It can implant ions at high speeds with excellent accuracy and repeatability. The model utilizes a dynamic range of ion energies to ensure that the appropriate ions are implanted in the right locations. VARIAN VIISion 80 includes a sophisticated, highly-sensitive monitoring equipment that allows for the accurate monitoring of both beam and doping parameters. The system can analyze implantation rate, dose rate, beam angle, wafer angle, and other data. The monitoring unit can also detect low-level substrate damage, allowing the user to quickly react to any critical process issues. VIISion 80 also features a sophisticated data processing and analysis machine that allows for a high level of accuracy and control. It includes advanced statistical data analysis features and allows the user to quickly adjust the parameters for a large variety of processes. Furthermore, VARIAN VIISion 80 includes advanced software for the calculation of implantation doses, allowing for more accurate implantations. VIISion 80 is a powerful and cost-effective solution for the successful implementation of advanced semiconductor electronics. Its highly accurate imaging, beam delivery, and monitoring systems enable it to provide precision implants with outstanding results. Its versatile data processing and analysis tools make it a great choice for any semiconductor fabrication process.
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