Used VARIAN VIISta 80 Classic #9051472 for sale
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ID: 9051472
High current ion implanter, 8"
Cassette interface:
(4) FOUP
Small WIP buffer
Dual 25-Wafer polished load locks
Energy range: 200eV to 80keV
IHC Ion source
Single filament bernas ion source
Long life PFG filament
Beam energy probe
High resolution:
90° Analyzer magnet
70° Magnet module
70 D magnet module providing uniformity & parallelism control, plus energy filtering
Dual plasma Xe flood gun
2D Profile faraday
Varian positioning system (VPS): Recipe interlock incident angle control system
Rotating platen: X-Tilt capable - 0°to 60°+/-0.1°accuracy
Gas cooled electrostatic platen
Vertical scanning
Replant select kit
Facility connections: Bottom fed (Air, water, power)
Turbo pumps / Cryogenics:
(3) Helix / CTI 250F on-Board cryo pumps
Beamline: (1) Pfeiffer TMH2101
Source: (1) Pfeiffer TMH2101
End station / LLKs: (2) Varian 300-HT
(1) VARIAN triscroll-300 dry pump
(1) Diaphragm rough pump (Air-bearing diff. seals stage 2)
(1) Venturi pump (Air-bearing diff. seals stage 3)
Remote pump kit:
15M Remote pump harness / Helium lines
Std remote pump rack
Gas config:
Ar - HP (CGA 580, Praxair specified)
BF3 - SDS (Unit MFC)
AsH3 - SDS (Praxair specified)
PH3 - SDS (Praxair specified)
SiF4 - HP (CGA 330)
CO2 - HP (CGA 320)
N2 - Maintenance purge (Bulk ext feed)
VARIAN control system (VCS):
Operating system: Win NT / 2000
Auto-Recipe set-up
Optimization
Control
Production scheduling
WIP Tracking
HSMS SECS / GEM Interface
12" SEMI Standards SW: Includes E5, E30, E37, E37.1, E39, E40, E87, E90, E94
Power requirements: 208V (50kVA), 175A
(3) Phase
(5) Wire
Freq 50/60Hz
Safety / Regulatory:
S2-93A Compliant
High voltage warning displays (5 Locations)
Source exhaust flow INTLK
Lead floor radiation shield
Hinged enclosure doors (Interlocked)
Status lamp (RYGB, INCDST, CE certified)
UPS – Control system & Platen
EMO Interlocked vesda smoke detection
Exhaust (Gas box, Mech pumps, Cryo pumps) designed for thru-the-roof connections
Installed options:
Replaceable source liners
Vaporizer & Power supply
Ar external purge assembly (Slot 1, UNIT MFC)
Inert process gas option for Slot 7
Unit MFCs
Stainless steel UES exhaust
Thru-beam wafer mapping
SEMI E58 ARAMS compliance
SEMI E84 compliance
V80 Factory automation Kit (Infineon specific)
Wafer viewing, Wafer ID (12" backside OCR semi M12 reader)
(4) Pole GFI power kit
CE Marked line filter
Reduced brass kit
Teflon toxic exhaust roughing line
Grounding kit using star washers
Customer supplied 50HZ freq converters for CTI C
Bernas source with (5) gas stick
Profile faraday to ensure uniform beam current distribution
Multiple faraday systems for beam angle measurement & real-time monitoring
Recipe interlockable incident angle control system
Dual plasma flood gun system
Gas box with (5) gas stick
CES End-station
End station with orientation control: 0~360 degree at +/- 1 degree accuracy
Tilter-C platen
Precise control of tilt angle: +/- 0.1 degree accuracy
N2 Gas + Water cooled electro-static platen
with 1KW or 2.4KW chiller
Vertical scanning using linear servo motor driven
Industrial air bearing
Dual (25) wafer capacity
Equipped for 8" wafer sizer operations
(3) CTI Cryo-Torr 8F cryo pump at process chamber
(2) PFEIFFER TPH2101UPC DN 250 ISO-K, 3P - Source & Beamline Turbo Pump
(2) Loadlock Turbopump
VARIAN 300HT and Pfeiffer
(2) Alcatel :ADS501 Roughing Pump - Source, Edwards Roughping Pump - E/S
(2) VARIAN TriScroll Pump
VARIAN Membrane Pump
Module division:
Gas box module
Facility module: 208V, 3P, 5W, 50KVA with UPS
90D Magnet module
70D Magnet module
Source control module with source isolation transformer
Tool control rack module
End station module
Parts:
90D Waveguide
70D Waveguide
Profiler assembly
Source dry pump: Alcatel:ADS501
E/S Dry Pump: Edwards
Chiller assembly (Affinity 1KW or 2.4 KW)
D.I. Water pump assembly with filter
Service monitor assembly
(2) Compressor assembly (9600)
(13) Door assemblies:
(5) Right
(5) Left
(2) Rear
(1) Inside center
Door lead panel assemblies
Roof lead panel assemblies
Roof beam assemblies
Door post panel assemblies (Frame)
Roof post panel assemblies (Frame)
(2) CTI Cryo pump: Excluded for cleaning chamber of E/S from E/S Module
(2) Gate valve and housing: Excluded for cleaning chamber of E/S from E/S Module
Lead floor assemblies
D2 Lens assembly
Lelium line
MISC parts (Miscellaneous)
Currently crated
2000 vintage
VARIAN VIISta 80 Classic is a medical device used in ion implantation and monitoring. It is a high-precision tool with a high level of accuracy and performance intended for industrial and medical applications. The device uses a six-axis motor design with two rotating and four linear axes. This allows for precise and reliable accuracy when controlling and monitoring the injected ions. It has a linear field of view of up to 20 cm and can accommodate a wide range of shapes and sizes of ion source up to 10 cm in diameter. VIISta 80 Classic includes a PC interface for a Windows XP or later operating system. The user can control the device with the provided software, adjust parameters and monitor the status of the implantations. The user interface also features a real-time graph display and alarm monitoring. The device offers a range of precision implantation capabilities, including selectable implant depths, uniformity, and dose rate. It also features a series of adjustable beam intensity settings, allowing the user to fine tune the implant area and optimize the rate of implantation. The device also features two mechanisms for monitoring the quality of implants: an on-axis electron-bombardment as well as an external gas media probe. The on-axis feature monitors the charge state of the implant more efficiently than any other technique, while the gas media probe checks the uniformity of the implant by measuring its depth and energy deposition. Finally, VARIAN VIISta 80 Classic uses a multi-ion source that is placed close to the implant, greatly reducing cross-contamination between implants and maximizing the accuracy of implantations. Overall, VIISta 80 Classic is a reliable, high-performance ion implanter and monitor. It provides sophisticated, accurate and reliable results that can help optimize patient care in both industrial and medical settings. With its robust construction and complete control software, VARIAN VIISta 80 Classic is an essential tool for any professional working in the field of ion implantation.
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