Used VARIAN VIISta 80 HP #9055369 for sale
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ID: 9055369
Wafer Size: 12"
Vintage: 2004
High energy current ion implanter, 12"
CE Marked
Cassette Interface:
(4) FOUP
Small WIP Buffer (Single wafer processing end station w/wafer Orient Control)
(Qty 2) 25-Wafer Loadlocks
Energy Range: 200eV to 80keV
IHC Ion Source
Beam Energy Probe (for D1/D2 module control at 70/90° magnet regions)
High Resolution 90° Analyzer Magnet
70° Magnet module
Dual Plasma Xe Flood Gun
2D Profile Faraday
Varian Positioning System (VPS): Recipe interlock incident angle control system
Rotating Platen (X-Tilt capable from 0° to 60° +/-0.1° accuracy)
Gas Cooled Electrostatic Platen
Vertical Scanning
Roplat Select Kit
Facility Connections: Bottom Fed (air, water, power)
Turbo Pumps/Cryogenics:
(Qty 3) Helix /CTI 250 F On-board cryo pumps
Beamline: Pfeiffer TMH2101
Source: Pfeiffer TMH2101
End Station/LLKs: (2) Varian 300-HT
Varian Triscroll-300 Dry Pump
Diaphragm Rough Pump (air-bearing diff. seals stage 2)
Venturi Pump (air-bearing diff. seals stage 3)
Remote Pump kit:
15M remote pump harness/helium lines
Standard remote pump rack
Gas Config:
1: Ar - HP (CGA 580, Praxair Specified)
2: BF3 - SDS (Unit MFC)
3: AsH3 - SDS (Praxair specified)
4: PH3 - SDS (Praxair specified)
5: SiF4 - HP (CGA 330)
6: CO2 - HP (CGA 320)
7: N2 - Maintenance Purge (Bulk ext feed)
Affinity chiller
VIISTA Varian Control System (VCS):
Operating System: Win NT/2000
Auto receipt set up, optimization, control, production scheduling, WIP tracking, etc
HSMS SECS / GEM Interface
12" SEMI Standards SW: includes E5, E30, E37, E37.1, E39, E40, E87, E90, E94
Power Requirements: 208V (50kVA), 175A, 3-Phase, 5-Wire, Freq 50/60Hz
Power Dist. Schematic: E10144070
3KVA UPS (supports Control System & Platen)
Safety:
S2-93A compliant
High voltage warning displays (5 locations)
Source exhaust flow INTLK
Lead floor radiation shield
Hinged enclosure doors (interlocked)
Status lamp (RYGB, INCDST, CE certified)
UPS - control system and platen
EMO interlocked Vesda smoke detection
Exhaust (gas box, mech. pumps, cryo pumps) designed for thru-the-roof connections
Included Options:
Replaceable source liners
Vaporizer and power supply
Ar External purge assembly (slot 1, unit MFC)
Inert process gas option for slot 7
Optional HP gas stick, unit MFCs
Stainless steel UES exhaust
Thru-beam wafer mapping
SEMI E58 ARAMS compliance
SEMI E84 Compliance
V80 Factory automation kit
Wafer Viewing (color video monitoring)
4-Pole GFI Option Kit (Main PD Only)
Reduced brass kit
Teflon toxic exhaust roughing line
Grounding kit using star washers
Customer supplied 50Hz freq converters for CTI cryos
Currently stored in a warehouse
2004 vintage.
VARIAN VIISta 80 HP is a high-performance ion implanter and monitor designed for use in semiconductor production. It is capable of providing extremely accurate nanometer-scale implantations and is equipped with an advanced monitoring equipment for single-shot implantation. VARIAN VIISTA 80HP offers a wide range of implantation power and ions per batch, making it ideal for modern ion implantation processing. It features a state-of-the-art beam guidance system combined with high-precision ion optics to provide highly accurate scans that meet the needs of the most demanding implantation applications. This unit is also capable of adjustable implantation doses, enabling users to precisely tune the implant dose for each application. VIISta 80 HP also features deep implantation capabilities, allowing users to precisely control the implant depth to the nanometer scale. This advanced machine is capable of implanted depths up to 0.1µm, enabling users to achieve better homogeneity and improved device performance. In addition, VIISTA 80HP is equipped with a fast-acting arcing tool that minimizes arcing times making it suitable for high-throughput applications. This asset also features advanced monitoring capabilities which allow users to monitor the implantation process and ensure high quality and repeatability. VARIAN VIISta 80 HP has been designed to meet the needs of the most demanding production environments and is available with either an earlinerts or an EAS vacuum model. This sleek and compact equipment is also equipped with a self-diagnostic system which offers both remote and local service diagnostics, making it a very reliable implantation unit. Overall, VARIAN VIISTA 80HP is an ideal choice for semiconductor production due to its high-performance capabilities, deep implantations, adjustable implantation doses and monitoring capabilities. This advanced machine is designed for high-throughput applications and offers excellent implantation accuracy and repeatability.
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