Used VARIAN VIISta 80 HP #9357814 for sale
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ID: 9357814
High current implanter, 12"
PC, P/N: E11130730
VESDA Smoke detector
Water leakage sensor
CVCF PD, P/N: E19009490
Remote rack
Lead floor
Service monitor
Input power: Bottom supply
Vacuum system:
(2) CTI-CRYOGENICS 9600 Cryo compressors
(3) CTI-CRYOGENICS 250F Cryo process chambers
(2) PFEIFFER TMH 261 YPX Load lock pumps
STP-A2203C2 Source turbo pump
With SCU1500 controller
STP-A2203C2 Beamline turbo pump
With SCU1500 controller
IGX100M Source rough pump
IQDP80 End station rough pump
IQDP80 End station diff pump
End station (UES):
BROOKS Buffer type
Graphite air bearing, P/N: E19282790
Y-Tilt type: Driven side encoder
Cassette platform, 12"
Wafer mapping: Thru beam
Wafer walkout sensor
Cassette sensor present
Tilter head: Roplat
IN-VAC Profiler assembly, P/N: E11313830
Light curtain
Load lock
BROOKS / PRI AUTOMATION Robot (Left robot removed P/N: E40001450)
Signal tower
Scan harness
Process module controller
Transport module controller
Source and beamline:
Energy probe
Ion source
Filament power supply
Arc power supply
Bias power supply, P/N: E19013050
Source magnet power supply, P/N: E11106220
High and low extraction power supply
Extraction Suppression power supply
70° Magnet power supply, P/N: E19007880
90° Magnet power supply, P/N: E19007880
(2) Decel power supplies
Decel 1 suppression
Quad 2 power supply, P/N: E19283050
70 and 90 Rod controller
Exhaust conductivity monitor
Gas box: P/N: E11140710
(5) Gases:
Gas / Part number
Gas 1 / E11116732
Gas 2 / E11147261
Gas 3 / E11147241
Gas 4 / E11147251
Gas 5 / E11116782
Missing parts:
Qty / Part number / Description
(1) / PAA-003B_CE50CBD3 / Platen chiller
(2) / E11290090 / Manipulator controllers
(1) / E11084150 / Beam gate assembly
(1) / E15003820 / Suppression interface PCB
(1) / E11320430 / Orient assembly
(1) / E40001450 / BROOKS / PRI AUTOMATION Left robot
(1) / E11368067 / ESC Platen
(1) / E1133573 / Bipolar switch box
(1) / E11320190 / QUAD 2 Lens assembly
(1) / E1132601(1) / D2 Suppression power supply
(3) / E11292270 / ADIO
(1) / E11092090 / PFG Controller
(1) / E11061452 / Scan motor assembly, rail
(2) / - / L/P Clamp assemblies
(1) / E16135690 / ARC Power supply cable
(1) / 354019-TD-T / IG2 Gauge
(2) / 354019-TD-T / IG3 Gauges
(1) / E33000206 / G2 Gauge
(1) / E33000206 / G3 Gauge
(1) / E33000206 / G10 Gauge
(1) / E1106196 / Aperture, variable assembly, 12"
(1) / E11117460 / Left loadlock vent assembly
(1) / E11076570 / Setup cup current monitor
(1) / E11130962 / Twist motor and cover
(1) / - / INVAC Profiler interface board
(1) / - / PFG Assembly
(1) / - / Servo gemini controller
(1) / - / Wafer orient
(1) / - / Platen
(1) / - / Decel 2 suppression, P/N: E11326011
(1) / - / Gas stick #6
(1) / - / Vaporizer
2004 vintage.
VARIAN VIISta 80 HP Ion Implanter & Monitor is a high-powered tool used in semiconductor lithography for depositing ions into a substrate. This process is known as ion implantation and is used in the fabrication of integrated circuits, photovoltaic cells or other electronic components. VARIAN VIISTA 80HP is capable of implanting ions of multiple species, energy, and doses into a substrate. The device features a GaAs implanter which utilizes an alpha source and ion beam transport system to ensure high-acceleration of the ions. This process is initiated by the main control software, which allows the user to configure the implant parameters such as beam species, energy, and dose. In addition to the implanter, VIISta 80 HP also includes a monitor which is used to measure the particle beam flux and energy. The energy readings are used to ensure the beam parameters are optimized for the desired implantation process. The device has a number of safety features incorporated to ensure operator safety, including a shutter system, beam collimation, and interlocks. When enabled, these features help minimize stray ion beam radiation and reduce the risk of exposure. It also has interlocks that prevent the beam from striking the substrate if the parameters are not within the expected range. VIISTA 80HP is a reliable and efficient tool designed to meet the demands of the semiconductor industry. The flexible software allows users to fine tune the implant parameters to achieve high yields and reduce contamination in their process. The addition of safety features also provides the operator with peace of mind that their process is secure and radiation exposure is minimized. With its advanced features, VARIAN VIISta 80 HP continues to be a benchmark tool in the semiconductor lithography industry.
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