Used VARIAN Viista 810 #9012362 for sale
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ID: 9012362
Medium current ion implanter
8" and 12" bridge capable
Software version: 7.1
Power distribution: 60 Hz
End station:
Single wafer processing
Integral orientation control
±60° 2-axis
Programmable in 1° steps
Accuracy: ±0.5°
Orientation: 0 to 360° at ±1° accuracy
Rotation: equivalent multi-tilt
Quad mode
No buffer station
No FOUP or small WIP buffer
Cryopumps: CTI 250F, (chamber), P1, P2, P3, no P5
Cryopumps 2: CTI 250F, (beamline), P4
Cryopumps 3: CTI 250F, (corrector magnet), no P6
Venturi pump for air-bearing differential seals, stage 3: Vaccubrand MZ 2T Diaphragm
Roughing pump: Edwards XDS35i
Roughing pump 2: Alcatel ADP 122P
Roughing pump 3: Alcatel ADP 122L
TMP: (1) Pfeiffer TMH-261, (1) Varian V300HT turbo molecular pump for end station load locks
TMP 2: Pfeiffer TMH 521 for the source (P1)
TMP 3: Pfeiffer TMH 521 pump for the beamline
Pump remote kit: 15 m cable length (for cryo-compressors, dry pumps and DI water system)
Gasbox 1: Ar HP UNIT 1660
Gasbox 2: BF3 HP UNIT 1660
Gasbox 3: AsH3 SDS UNIT 1662
Gasbox 4: Ph3 SDS UNIT 1662
Gasbox 5: none
Gasbox 6: none
Gas card configuration:
Machine: IMMC1C3000
Bottle 1: SDS As
Size: 10X
Bottle 2: SDS Phos
Size: 10X
Bottle 3: BF3
Size: 10X
Bottle 4: Ar
Size: 10X
Bottle 5: Xenon
Size: 7X
Gas / DISS/CGA / Torque / Head Size / Head Stamp
Argon / diss 718 / 12 lbs / 1 3/8 in / non
Sds phos / .5 in vcr / 35 lbs / 1 in / sds
Hp phos / diss 632 / 35 lbs / 1 1/4 in / tox
Sds arsine / .5 in vcr / 35 lbs / 1 in / sds
Hp arsine / diss 718 / 35 lbs / 1 1/4 in / tox
Bf3 / diss 642 / 12 lbs / 1 1/4 in / tox
Enriched boron / cga 330 / 25 lbs / 1 1/8 in / ben
Xenon / cga 180 / 12 lbs / 3/4 in / xen
Co2 / cga 180 / 12 lbs / 3/4 in / xen
Xenon / cga 580 / 47 lbs / 1 1/4 in / xen.
VARIAN Vista 810 is a state of the art cylindrical ion implanter and monitor. Capable of implanting up to 45 amps of constant current, it is an invaluable tool for sub-surface implantation and ion influx monitoring. The device operates in two modes: pulsed with up to 5 kHz frequency, and constant current with up to 0.5 Hz frequency. For optimal utilization, the Voltages, energies, waveforms and pulse durations are all adjustable allowing versatility in the type of implantation performed. The Vista 810 is built with safety in mind. With its vacuum protected chamber and overcharge control system, the unit is compliant with both industrial and safety standards. Additional features include a programmable access panel to restrict access to selected areas of the unit, and an integrated remote emergency shutoff switch. The Vista 810 features an intuitive 15-inch LCD touchscreen control panel. The easy to use controls, as well as comprehensive data logging and software, allow users to monitor all implantation parameters in real time. The screen itself has a built-in diagnostics function and a variety of readouts which display time elapsed, peak voltage/current applied, total dose applied, sample temperature and more. The implantation application of the Vista 810 is incredibly versatile. The modulation amplitude and lift-off depth of the implant can be adjusted for each implant. The unit also offers a wide range of flexibility in implantation depths. With an adjustable implant size and charge, the device can cover a wide range of surface implantates. The Vista 810 both can monitor simultaneous implant applications, thereby providing a real-time picture of both implantation parameters and implanted charges. With its large selection of implantation parameters, the device can perform a large variety of implantations in various semiconductor materials. Furthermore, the results of the implantation can be saved for future reference. VARIAN Vista 810 is an incredibly powerful ion implanter and monitor. Not only does it cover a range of implant applications, but its intuitive user interface, along with its comprehensive data logging and software, make it an ideal choice for engineers and technicians alike.
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