Used FEI Helios 1200AT AFL #293600559 for sale
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ID: 293600559
Wafer Size: 12"
Vintage: 2013
Focused Ion Beam (FIB) system, 12"
2013 vintage.
FEI Helios 1200AT AFL is an advanced ion milling system for the removal of ultra-thin films from various surfaces. This tool, part of FEI Helios Series, provides a unique combination of precision and speed. Helios 1200AT AFL features a number of important benefits, including its ability to achieve very high film removal rates with low ion energies. It also offers highly accurate milling of films to thicknesses ranging from 0.1nm to 2,000nm, and improved controllability of the process down to the angstrom level. Additionally, the tool offers improved productivity and large process window optimization. FEI Helios 1200AT AFL is based around a single, high-resolution electron column. This column enables the detection and focusing of powerful low-energy ions, making them ideal for ultra-thin films and high-resolution milling applications. The ion source used in this tool is an adjustable-aperture type, which offers the ability to tune the aperture size and accuracy for optimum controlled milling. This, in turn, allows for the characterization and manipulation of films down to the angstrom level. For increased material selectivity, Helios 1200AT AFL includes a variable range of beam energies ranging from 10 keV to 500 keV, making it a powerful tool for achieving the highest-quality milling. FEI Helios 1200AT AFL is optimized for maintaining the material properties of various substrates, while also offering maximum usability. This system is equipped with an automated alignment system that, once calibrated, negates the need for frequent manual optics adjustments. Finally, Helios 1200AT AFL is fitted with an easy-to-use user interface and mobile software. This provides a powerful control mechanism for optimizing and controlling the processes, as well as a secure protocol for data collecting, analysis, and management.
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