Used FEI Helios NanoLab 1200HP #9250534 for sale
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ID: 9250534
Wafer Size: 12"
Focused Ion Beam (FIB) system, 12"
Electron column:
Elster column, field emission gun
Beam voltage:
SEM: 350 V - 30 kV
Ion column:
Tomahawk, Ga liquid metal
1,500 Hours
FIB: 500 V - 30 kV
FIB Current: 1 pA - 65 Na
Image resolution:
SEM:
Visual resolution < 1.4 nm at 1 kV / 11 pA Mode ll WD 1.0 mm
Visual resolution < 1.0 nm at 15 kV / 11 pA Mode ll WD 4-5 mm
FIB:
Visual resolution < 4.0 nm at 30kV / 1.1 pA
5-Axes motorized stage (Tilt eucentric)
Load 8" / 12" wafer
Detectors:
TLD Detector
ICE Detector
STEM I Detector
OmniProbe 200 Plucker
Gas injection system:
Platinum deposition
IDEP lll Deposition.
FEI Helios NanoLab 1200HP is an innovative ion milling equipment that provides a range of advanced capabilities for nano-scale precision milling. The system features a dual-beam design with both gallium sourced ion and electron sources. This allows for a unique cutting and structuring experience, giving users the ability to create features and surfaces as small as 30nm in just a few minutes. This makes FEI Helios ideal for the production of 3D MEMS/NEMS components and devices. The unit includes an automated sample manipulation machine, tunable milling parameters, and a user interface specifically designed for optimal operation. An intuitive user interface lets users quickly set mill parameters, observe progress and adjust parameters on the fly. This tool allows for dynamic control of milling conditions, allowing for the perfect parameters for each part being machined. Furthermore, the asset includes multiple source and gun configurations, as well as a high precision, closed-loop motion model for maximized throughput. The advanced vacuum environment allows for effective machine operations in a sealed environment, minimizing contamination. The chamber is full of a noble gas - typically argon - providing damage protection and increased milling rates. The equipment also includes an integrated cooling system for improved temperature control. Finally, a wide range of gas feeds are available, enabling the unit to better optimize the milling process. The Helios NanoLab offers a range of features designed to improve its precision and productivity. Its three-axis closed-loop motion machine ensures accurate part positioning, and its advanced motion controller enables high frequency moves. An intelligent auto-tuning function allows users to easily find the best milling parameters for each machined part. Finally, the tool offers enhanced safety features such as shock-resistant hard axes and noise suppression systems to minimize the risk of damage or bodily harm. The Helios NanoLab is the perfect choice for the production of micron and submicron structures. Its advanced design enables fast milling times and superior accuracy. The user-friendly interface and range of advanced features makes it ideal for applications in a variety of industries, such as electronics, medical, aerospace, and semiconductor. Whether you are machining thin film components, MEMS devices, or ultra-high precision components, Helios NanoLab 1200HP offers dependable, precise machining.
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