Used FEI / MICRION 9500 EX #293641374 for sale
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ID: 293641374
Focused Ion Beam (FIB) system
Stage type: 200 mm x 200 mm
Loadlock type
IBM RISC System, 6000 43P
140 Computer/AIX 4.1.5
MCP Detector
I-Gun column type: 5 nm
Beam current: 3 pA - 931 pA (50 kV)
Depo system:
Tungsten
TMCTS
Gases: O2, H2O, Cl2/Br2, XeF2
Vacuum pump:
Turbo molecular pump
(2) Mechanical pumps
(2) Ion getter pumps.
FEI / MICRION 9500 EX is an advanced ion milling equipment designed for sample preparation. It specializes in providing high-precision surface planarization for a variety of substrate materials. It is well suited for process applications such as sputtering, sputter etching, extended ion milling and other materials removal techniques. FEI 9500 EX utilizes a digital computer-controlled six-axis linear motor drive system that allows for motorized stages and variable AC/DC ion sources. The dual source AC/DC unit is used to create reliable ion beams that are optimized for ion milling applications. This machine also features energy efficient operation and an advanced ion source design that offers adaptive beam flux and nominal ion source filament operation. MICRION 9500 EX includes a 24-position sampler cassette, a digital angular goniometer, high-speed shuttering and a sample rotation stage. 9500 EX is equipped with a high-resolution optical display tool which delivers a real-time view of the ion milling process. This asset is capable of monitoring the substrate surface for uniform planarization, grain alignment and and particle accumulation. FEI / MICRION 9500 EX also features a high-resolution dose control model and a wide range of customizable scanning parameters for specific processes. The software and hardware components provide a comprehensive approach for controlling ion milling processes and optimizing the performance of a wide range of materials removal techniques. FEI 9500 EX is designed to provide rapid, highly accurate sample planarization and contain a range of automated and hands-on operating functions. It is also compatible with a variety of equipment accessories such as an integrated cooling system, remote monitoring capability, a work flow unit and a user-friendly interface. Furthermore, MICRION 9500 EX also offers a range of advanced analytical abilities such as SIMS analysis, elemental composition analysis and X-ray diffraction analysis. 9500 EX is one of the most advanced ion milling systems available on the market. It is a reliable and versatile tool for creating highly detailed surfaces on a variety of substrate materials and offers a comprehensive range of features for optimizing surface preparation processes.
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