Used FEI / MICRION DB865 #9292680 for sale

FEI / MICRION DB865 is a high-resolution ion milling equipment designed for precision etching of small features on a wide range of materials. This type of system is ideal for research and development applications in electronics and semiconductor manufacturing, and has been used on a wide variety of applications such as medical implants, MEMS devices and other highly sensitive surfaces. The main components of FEI DB865 unit include a fully automated manipulator, a DC power supply, a nitrogen-cooled ion gun, and a vacuum enclosure chamber. The manipulator of the machine is used to control the sample in the X, Y, Z, and angular directions. The DC power supply and the nitrogen-cooled ion gun are used to generate the ion beam used to etch the sample's surface. The ion gun is equipped with an electrostatic focusing lens for directing the ion beam on a localized area of the sample. The vacuum enclosure chamber maintains the vacuum required for etching, and also provides high-temperature heating/cooling, and ultra-high vacuum (UHV) conditions for etching sensitive devices. MICRION DB865 tool is capable of beam bending and surface scanning, which allows it to mill relatively large areas of a sample at once. The precision of the etching is determined by the size of the focal spot of the ion gun, which can range from 10 to 500 nm. The maximum sample size accept by the manipulator is 180 mm x 90 mm, and the limited power supply allows an etching current of up to 1.5 mA. In addition, the asset can be used at different gas pressures for different etching applications, as well as etching by oxide removal and etching by alloy removal. DB865 model is equipped with an offline control software package that allows the user to graphically set up the etching parameters, as well as monitoring and controlling the equipment during process operation. Additionally, the remote monitoring capability can be used to monitor the system's operational status when the unit is in use. Overall, FEI / MICRION DB865 is a versatile and robust ion milling machine that is ideal for precision etching of small surface areas on different materials. With its high precision and wide range of etching capabilities, FEI DB865 tool is an invaluable tool for research and development applications in the electronics and semiconductor industries.