Used FEI / MICRION Vectra Vision #9200449 for sale
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ID: 9200449
Particle beam system
I-Gun type: 5nm Column
Beam current: 3pA~931pA (50kV)
Depo system:
Tungsten
Tmcts
O2
H2O
Cl2 / Br2
XeF2
Vacuum type:
Turbomolecular pump
(2) Mechanical pumps
(2) Ion getter pumps
Stage type:
OBIC Laser: 200mm x 200mm
Loadlock type: Loadlock system
PS / OS: IBM RISC System / 6000 43P Model 150 computer / AIX 4.3
Detector: MCP.
FEI / MICRION Vectra Vision is an ion milling equipment designed to mill various materials for large area nano-abrasive machining processes. It combines high-precision milling, advanced automation, and a smart-process controller to maximize throughput and performance. FEI Vectra Vision offers a number of features designed to increase productivity and accuracy. The main components of MICRION Vectra Vision are a set of magnetically-suspended, programmable milling heads, a tweezer-style mask loader, a motion-controlled rotary platen, and an integrated plasma source. The high-precision milling heads are capable of handling a variety of materials including metals, polymers, amorphous materials, and semiconductors. The integrated plasma source allows for ion milling without the need for liquid-front preconditioning. The motion-controlled rotary platen provides surface registration accuracy of +/-2.2 µm and rotational speeds of up to 16,500 rpm. Finally, the tweezer-style mask loader is designed to quickly and accurately transfer masks and substrates into and out of the mill's chambers. Vectra Vision is also equipped with powerful automation, control, and software capabilities. The system's TrueView Software Suite is designed to monitor the entire process, from substrate loading and positioning to region selection and milling, and is optimized to maximize productivity and accuracy. In addition, FEI / MICRION Vectra Vision's modular architecture and integrated custom controller ensure reliable, repeatable results across multiple milling cycles. The unit's modularity also allows easy expansion from basic to advanced features. Finally, FEI Vectra Vision is equipped with the latest safety features for user protection. Advanced Laser and Collimator sensing technologies provide real-time feedback to ensure that no personnel are exposed to hazardous working conditions. Additionally, the machine is compliant with all applicable safety regulations, including OSHA and ANSI standards. In conclusion, MICRION Vectra Vision is an advanced ion milling tool designed for large area nano-abrasive machining processes. It combines high-precision milling, advanced automation, and a smart-process controller to maximize throughput and performance. Additionally, the asset is equipped with powerful safety features for user protection.
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