Used FISCHIONE INSTRUMENTS 1020 #9253905 for sale
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FISCHIONE INSTRUMENTS 1020 is an automated dry etcher/asher designed for low temperature and variable power plasma processing, physical and chemical vapor deposition, and can also be used for cleaning applications. It is equipped with a powerful, high-resolution, digital processing controller and a 10" intuitive user interface to provide maximum performance compatibility and flexibility to the user. It has the capability of running high pressure, high-temperature, and high-cleaning-rate processes and is suitable for use in diverse industrial and research applications. 1020 features a 2.25" wide chamber and a 2.5" backside view etch window, with a chamber capacity of up to 24 individual 1"wafers. The chamber and etch window are made of stainless steel, and the adjustable vacuum system consists of a roughing station. This allows for close control over the etch process, providing precise etch control and superb etch results. The source part of FISCHIONE INSTRUMENTS 1020 is stackable with various options to replenish the etch chamber and etch window and keep the process going. 1020 is driven by a reliable PLC (Programmable Logic Controller) with digital communication protocol ports and digital control signals that give detailed control over the etch process. Additionally, the user interface has several process control functions that enable the users to predetermine the desired parameters of each etch run. The PLC provides the logic and monitoring to ensure that all the equipment and processes in the etch chamber are running correctly. The1020 also features two additional safety components that ensure minimal risk of any accidents that may occur during operation. The first is the Safety Interlock which is designed to prevent any unauthorized access to the etch chamber and etch window. The second is the E-STOP safety switch which is designed to shut down the machine in the event of an emergency or unforeseen incident occurring. FISCHIONE INSTRUMENTS 1020 is an ideal etcher/asher for research and manufacturing processes. It is effectively driven with a reliable PLC and digital communication protocols, while its backside view etch window and chamber capacity enable precise etching, allowing the users to achieve superior etch results. With its powerful digital processor, large chamber capacity, and adjustable vacuum system, 1020 is engineered for industrial and research-grade applications.
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