Used GATAN 691 PIPS #9075091 for sale
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ID: 9075091
Precision ion polishing system
Ion source:
Ion guns: (2) Penning ion guns
Milling angle: +10i to -10i, (adjustable)
Ion beam energy: 1.5 keV to 6 keV
Beam diameter: 350 m FWHM at 5 keV to 800 m FWHM at 5 keV
For broad beam guns
Ion current density: 10mA/cm2 peak
Beam alignment: Precision beam alignment
Specimen stage:
Sample size: 3 mm or 2.3 mm
Mounting: Gatan patented DuoPost (standard) or Graphite holder (optional)
Rotation: Variable from 1 to 6 rpm
Beam modulation: Single or double sector for exceptional cross-sectioning
Viewing: Binocular microscope: 40x or 80x
Vacuum:
Dry pumping system: Molecular drag pump
Pressure:
Base pressure: 5E-6 torr
Operating pressure: 8E-5 torr
Vacuum gauge:
Penning type for main chamber
Solid-state for backing pump
Specimen airlock:
GATAN Whisperlok
Specimen exchange time: <30sec.
GATAN 691 PIPS is an ion milling equipment designed for use in nanofabrication facilities. Ion milling is a process whereby material is removed from a sample surface using an ion beam, typically as part of a sequence of steps for creating features with nanometer-level resolution. This particular system was developed and manufactured by GATAN, Inc., a leading manufacturer of electron microscopy, imaging, and analysis instrumentation. 691 PIPS is a user-friendly unit suitable for high-throughput, batch-processing applications. It is well suited to mill stages with many sample mounted devices, and is capable of positioning a five-column stage of samples in one motion or a single sample in a series of steps. The machine utilizes an automated controller to manage up to eight ion beam guns simultaneously, allowing for easy adjustment of beam current (Ion milling current can range from 0-15 milliamps) and adjustment of the beam angles. In addition, the tool allows for the automation of sample loading, unloading, sample identity, and exacting beam patterns (along with specific parameters needed). GATAN 691 PIPS offers a wide range of in-situ inspections which further ensures accuracy and reproducibility during ion milling operations. In-situ inspections including visual inspection (of surface features or the lack thereof), optical microscopy (for review of the sample surface before and after milling processes), Secondary Electron Microscopy (SEM) and Scanning Electron Microscopy (SEM) to allow for further analysis of the milled surface. The asset itself includes a robust vacuum chamber, an optimized sample stage with enhanced sample stability, adjustable stepper motors for precise location of the sample stage, XYZ mechanical scanner, digital chamber controller, automatic controller, automated alignment model, and a variety of ion milling guns to meet a range of requirements. The equipment is designed with an optical port for sample analysis, an ion contamination monitoring system, and a gas delivery unit for faster nitride etching and surface cleaning. A variety of safety and process control features are available, including a vacuum alarm machine, inert gas handling systems, and UV decontamination. Additionally, 691 PIPS is equipped with diagnostics to help troubleshoot any potential problems that may arise. GATAN 691 PIPS is considered an ideal choice for nanofabrication applications, offering superior accuracy, repeatability, and ease of use. Its automated features simplify the manufacturing process, and its wide array of in-situ inspections ensure accuracy.
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