Used LAM STRATA-3 #293609722 for sale

LAM STRATA-3
Manufacturer
LAM
Model
STRATA-3
ID: 293609722
Wafer Size: 12"
Vintage: 2022
System, 12" Process: CVD 2022 vintage.
LAM STRATA-3 (Low energy ion milling) is a modern ion milling equipment designed for a variety of materials processing applications. It is ideal for applications requiring low energy ion etching, such as cleaning, patterning, and planarization. The system consists of a scanhead, a vacuum chamber, a wafer stage and HV source. The scanhead provides wide-range particle beam scanning control over the entire sample area. The vacuum chamber helps maintain a controlled vacuum in the work area and is connected to the scanning head. The wafer stage facilitates the placement of the sample onto the vacuum chamber. Lastly, the HV source is used to enable the beam current. The unit is powered by three ion milling guns. It has a higher tolerance for small particles and is used to remove the top layer of the sample material without damaging the underlying layers. The machine features both a low-energy and a high-energy gun for a variety of applications. The tool is also equipped with a newly developed hydrokinetic chamber, which produces a strong hydrodynamic flow and reduces the ion background in the ion beam. LAM-STRATA-3 features a unique wafer-handling asset that ensures that the wafer stays in place while the ion guns are in operation. The wafer supply, chuck, and cooling systems are all integrated into the ion milling model. The chuck holds the wafer during ion milling, while the supply equipment ensures that the wafer is precisely and accurately presented to the ion guns. The cooling system helps reduce heat absorption by controlling the temperature of the wafer and facilitates better etching results. The unit is compatible with different materials, such as aluminum and titanium. It has the capability to perform successive etch processing and can etch samples up to 50 microns deep. The software developed for LAM-LAM STRATA-3 allows for the processing of an unlimited number of wafers. In addition, the machine features chamber refilling and purging, creating a clean and ultra-clean environment. LAM-STRATA-3 is an ideal tool for a variety of different material processing applications. It provides a powerful and reliable solution at an affordable price. The asset is designed with advanced features, such as high ion beam current and a hydrokinetic chamber, to provide users with the best possible results.
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