Used OXFORD INSTRUMENTS Ionfab 300LC #293718221 for sale

ID: 293718221
Vintage: 2023
Ion Beam Etcher (IBE) 2023 vintage.
OXFORD INSTRUMENTS Ionfab 300LC is a cutting-edge ion milling equipment designed to deliver advanced capabilities for thin film deposition and etching processes in the field of semiconductor manufacturing, materials science, and other related industries. Ion milling is a versatile technique used to precisely etch and pattern materials at a nanometer scale by bombarding the substrate with energetic ions. At the heart of Ionfab 300LC system lies a powerful ion source that generates ions with controlled energy and directionality for precise material removal. The unit offers a wide range of ion species selection, including noble gases such as argon, as well as reactive ions like oxygen and nitrogen, allowing users to tailor the ion beam composition to match the specific material being processed. OXFORD INSTRUMENTS Ionfab 300LC is equipped with an advanced beam steering machine that enables high-precision control over the ion beam position and scanning patterns on the sample surface. This capability is essential for achieving uniform and selective material removal, critical for fabricating intricate patterns and structures with high aspect ratios. One of the key features of Ionfab 300LC is its versatile sample stage, which allows for precise positioning and rotation of the substrate during ion milling processes. This enables users to achieve uniform etching profiles across large-area substrates, as well as to perform complex etching geometries and multi-step processing sequences with high repeatability and accuracy. The tool is also equipped with advanced process monitoring and control capabilities to ensure optimal process stability and reproducibility. Real-time feedback mechanisms, such as optical emission spectroscopy (OES) and ion beam current measurements, provide valuable insights into the process dynamics and allow for in-situ process optimization to achieve the desired etching rates and selectivity. Furthermore, OXFORD INSTRUMENTS Ionfab 300LC offers a range of automation and software integration options to streamline the operation and data management processes. This includes recipe-based programming for easy process setup and parameter optimization, as well as remote monitoring and control capabilities for enhanced asset flexibility and productivity. In terms of safety and ergonomics, Ionfab 300LC is designed with user-friendly features such as interlocks and shielding mechanisms to protect operators from exposure to ionizing radiation and high-vacuum environments. The model also complies with industry standards and regulations for safe operation in laboratory and cleanroom environments. Overall, OXFORD INSTRUMENTS Ionfab 300LC ion milling equipment represents a state-of-the-art solution for precision material processing applications, offering advanced capabilities, high performance, and user-friendly operation for a wide range of research and industrial applications. Its versatility, reliability, and efficiency make it an ideal tool for achieving precise etching and patterning of a variety of materials with nanoscale precision and control.
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