Used OXFORD Ionfab 300 Plus #293815692 for sale
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ID: 293815692
Wafer Size: 6"
Ion Beam Etching (IBE) System, 6"
Materials: Au, Cr, Ta, Al, Fe, Co, Boron and Silicon
Process: IBE
Gas supply system including MFCs
(2) AR Gas lines
Ion source diameter: 35 cm
Single wafer capability
Load lock
Auto loader
Tiltable substrate holder angle: −90° to +35° (0° = vertical, 0° incidence angle)
Wafer backside cooling
No WLOM
Endpoint monitoring
Dry scroll pump
Small turbo molecular pump
Rotary vane pump
Turbo molecular pump
No chiller
Operating system: Windows XP
Power supply: 3000 W.
OXFORD Ionfab 300 Plus is an ion milling equipment designed for use in high-precision applications such as surface planarization, nanopatterning, and metal etching. It is equipped with a high-frequency, high-energy dual-beam ion source, which provides both chemical and physical sputtering. The system also features a variety of multi-stage rotary pumps and filtration systems for clean operation and long-term reliability. Ionfab 300 Plus features a 6-target gas injection unit, which provides precise gas/target composition programmability, a high-resolution color camera, and a comprehensive control machine with both manual and computer controlled options. The high-frequency Dual-Beam ion source can achieve a wide range of sputter process parameters including etch rates, deposition rates, and process reproducibility. The ion beam provides excellent surface finish quality with minimized surface residue and minimized surface effects. OXFORD Ionfab 300 Plus is equipped with a highly sophisticated control tool which is capable of precise control and monitoring of the sputter processes. This asset allows for a wide variety of process parameters to be programmed including substrate temperature, RF generator power levels, beam alignment, and pressure differences. The automated model can also be used for complex process recipes with manual intervention. In terms of safety and environmental considerations, the Oxonfab 300 Plus is designed with a low emission source, minimal noise, and low vibration levels. It is also certified to meet the health and safety requirements of the European Union and is compliant with the RoHS directive. Furthermore, the equipment is covered by a three-year warranty and is rated for operation in a 30°C to 95°C temperature range. Overall, Ionfab 300 Plus is an industry-leading ion milling system capable of producing impeccable results with precise control and repeatability. It is designed to cater to high-precision applications such as surface planarization, nanopatterning, and metal etching. The unit is also compliant with health and safety regulations and is covered by a three-year warranty for additional peace of mind.
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