Used OXFORD Ionfab 300 Plus #9261769 for sale
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ID: 9261769
Vintage: 1994
Ion Beam Etching (IBE) system
(4) Mass Flow Controllers (MFC)
Targets, 4"
Argon to mill metal layers on silicon wafers
Etching gun: 15 cm
Gun: 3 cm
Tooling, 8"
Upgraded motor controller
Manual
1994 vintage.
OXFORD Ionfab 300 Plus is a flexible, high-performance ion milling equipment, designed to provide a fast and reliable micro-structuring solution for a variety of materials such as metals, compounds, and semiconductors. It is well suited to a wide range of precision processes such as chip fabrication, resistor trimming, isolation etching, and damage removal. The system's structure and design enables it to quickly and accurately control the thickness and profile of both single and multi-layered substrates and materials, enabling it to deliver higher levels of fine feature definition at longer working distances than conventional ion milling systems. Ionfab 300 Plus uses an all-gas assist source, allowing wear at its anode and cathode electrodes to be reduced by up to 65%. This helps prolong the life-span of the machine, leading to longer production cycles and fewer maintenance costs. The internal components of the unit are highly customized. Its electron source provides a highly high energetic beam without dangerous parameters, using an ion beam generator for low cost, low pressure beam. Its chamber control machine provides control over the states of the vacuum chamber environment, as well as the flow of process gases to the substrate. The tool also utilizes a asset of automated vacuum controllers and pumps to maintain vacuum environment within the chamber. This ensures that the model runs at the optimal temperatures for producing the highest quality results. OXFORD Ionfab 300 Plus is powered by an advanced equipment automation software platform, allowing for direct control and monitoring of the entire system. The intuitive user interface allows technicians and operators to quickly create and assign complex process recipes, as well as monitor unit performance in real time. Ionfab 300 Plus also features a number of safety features to ensure operator and working environment protection. It is compliant with multiple international safety standards, and features a wide-ranging alarm machine should any process errors occur. Overall, OXFORD Ionfab 300 Plus is an excellent choice for those looking for a reliable, versatile, and cost-effective ion milling solution. With its advanced components, highly customizable design, and powerful automation platform, it is well suited for any micro-structuring application.
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