Used VEECO 350 #9119090 for sale
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ID: 9119090
Wafer Size: 8"
Ion Beam Deposition (IBD) system, 8"
With AVP Control system
(6) Targets
Single loader.
VEECO 350 is a variable energy ion milling equipment designed to provide precise control over the preparation of precise sub-micron surfaces and structures. It utilizes multiple frequency ion sources to create a range of different plane angle ion beam energies ranging from 0 to 350 keV. This allows users to selectively remove material from specific regions of a sample, controlling surface topography and structural features. VEECO 350 allows users to select the angle of attack from 6 to 88 degrees, enabling desired feature sizes below 8nm for total removal of a specific material thickness. A high throughput automated gun system enables large area milling, allowing simultaneous coating of multiple samples with high reproducibility. Protective film coats can also be applied to samples. This integrated unit can concentrate ions into both positive and negative energies for improved directional milling accuracy. Various types of integrated accessories for 350 can be added to provide varying ion milling results including sputter etch and chemical vapor deposition (CVD) films. The ion-beam source also includes a number of features to provide precise ion beam control and increased sample stability. The machine can be operated in either UHV or base pressures. A variety of ions can be used for either deposition or milling, enabling users to achieve desired milling results. The tool's windows also allow for the milling of vacuum-compatible samples with minimal contamination. The asset uses an image survey technology to read and analyze samples, allowing users to quickly and accurately determine the composition and thickness of the substrates. VEECO 350 has multi-axis automation, allowing for fast and repeatable milling processes that are customizable for a variety of samples. Overall, 350 enables users to precisely control ion milling results for a variety of substrates. Its flexibility, accuracy, and automated features make it a powerful tool for fabricating advanced nanostructures and sub-micron surfaces.
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