Used VEECO IBD / IBE #9313137 for sale
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ID: 9313137
Middle film PBD sputtering system
Cx6 C-2
Etch mill module
Computer
NEXUS CTC Flex-V2.08.135 Cluster tool controller
(3) Component cabinets:
(6) SORENSEN DSC60-18E / DCS600-17 Power supplies
(6) SPELLMAN SL300 / SL1200 Power supplies
ADVANCED ENERGY RF-20MWC Power supply
(2) APC Smart-UPS SC450
(2) CRU CD ROM Main / Backup drives
DC Power supply
(2) Cryo On Board controls
(2) Turbo power supplies
Matching network
Tuning panel
RF Power supply
SORENSEN DCS20-150 Power supply
(2) CTI-CRYOGENICS 9600 Compressors
Electrical cabinets
(2) EDWARDS QDP40 Vacuum pumps
EDWARDS IQDP80 Vacuum pump
POLYCOLD PFC-1100LT Cryogenic refrigeration unit / Chiller
DAYTON Overhead hoist with rail
Pendant.
VEECO IBD / IBE is an ion milling equipment that is used for planarization, subtractive etching, and device testing applications. The system is designed to enable precise, ultra-fine control of ion energy and flux in order to achieve the highest quality results possible. It features a highly optimized beam assembly and a linear controller that allows users to finely tune the ion beam parameters for maximum etch depth and uniformity. At the heart of IBD / IBE is a field emission electron gun, which produces a broad beam of energetic ions that can be focused and accelerated to the substrate. Once the beam reaches the substrate, it produces a planarization effect that is used to level out topographic surface structures. VEECO IBD / IBE also has the ability to precisely control etching depths, providing a uniform etch rate even on complicated 3D features. The unit's linear controller is capable of generating smooth, adjustable beam parameters, allowing users to fine tune the beam for optimal etching characteristics. VEECO advanced beam optimization process ensures that the entire topography of a structure is leveled out without creating lateral topography damage to adjacent features. In addition to planarization and subtractive etching, IBD / IBE can also be used for a variety of device testing applications. Its variable beam power allows users to perform current vs. voltage and temperature-dependent measurements with precision accuracy. The machine also includes several precise motion control options that enable precise device testing operations. Overall, VEECO IBD / IBE is an advanced ion milling tool that is designed to enable highly precise control of the beam parameters and motion control capabilities. It is an ideal tool for planarization, subtractive etching, and device testing operations that require high levels of precision.
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