Used VEECO / ION TECH MPS-3000 HC #9196218 for sale
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ID: 9196218
Vintage: 2010
Ion gun power supply
P/N: 6700-010
3-1500-100 3CM beam diameter ion source
Cable and power feed through
Neutralizer with cable
Interlock and probe cables
Spare parts included
2010 vintage.
VEECO / ION TECH MPS-3000 HC is a highly advanced ion milling equipment used for a variety of micromachining applications. This system effectively etches away at materials at a microscopic scale, creating nano-scale structures, shapes, and other features. VEECO MPS-3000 HC is ideal for a variety of semiconductor and mechanical processing applications. This advanced technology offers superior ion cutting capabilities and produces excellent results. ION TECH MPS-3000 HC features high beam current density and is equipped with a cutting unit in which two separate cutting heads move in a rotary motion. The machine can accurately etch features down to 1 µm in size with high resolution. To ensure precise and accurate results, the ion beam is tightly focused and circulated while the frame rate is very fast. In addition, the tool is equipped with several stages, each of which can be configured to apply different materials, masks, and etch parameters. The asset also incorporates several safety features. The ion beam is conditioned and scattered before it reaches the wafer, minimizing the wafer temperature during processing. The end station features an automated wafer handling model that is able to detect misalignment on wafers, and the equipment automatically compensates for any misalignments. This prevents damage to the wafer or other parts of the system. MPS-3000 HC also provides a range of process control capabilities. The user can issue commands to the unit from a remote location, and a variety of control parameters are available for customization. Additionally, the machine offers real-time monitoring and data log interpretation to enable fine process adjustments. This helps to maintain tool performance over long production runs. The asset also offers a wide range of user-friendly features. Its intuitive GUI interface makes it easy to understand and navigate, and the model provides clear tutorials and maintenance support. In addition, the equipment is equipped with secure remote control, allowing users to access system data from remote locations. Overall, VEECO / ION TECH MPS-3000 HC is an advanced and powerful ion milling unit used for a wide variety of micromachining applications. Its cutting capabilities, precision control, and safety features deliver excellent results for a variety of semiconductor processing tasks.
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