Used VEECO VS 300 #70878 for sale

VEECO VS 300 is an ion milling equipment for structuring of high aspect ratio profiles in inorganic materials like metals and ceramics. It is designed for materials processing applications such as micropatterning and micromachining in semiconductor and thin film device fabrication. The system is composed of four major components, the ion beam source, the scanner unit, the gas box, and the vacuum chamber. The ion beam source produces a high voltage potential aimed at the sample to release ions from the surface of the sample into the vacuum of the chamber. The ions bombard the targeted sample area causing its surface to ablate which leaves the desired pattern or etched features. The scanner machine ensures accurate and repeatable positioning of the ion beam to the sample. This tool consists of galvanometric scanners and a focus lens to control the deflection of the ion beam's trajectory. The gas box provides a controlled environment to deliver different gases needed to create patterning or etching on the substrate. The gases are then ionized and generated as a plasma which then enters the vacuum chamber. The vacuum chamber is sealed off, except for the chamber window, which allows for viewing of the sample and is connected to a cryopump, to maintain a vacuum associated with the ions and the substrate for proper ablation of the material. VS 300 is tailored for patterning and etching of substrates ranging from metals, semiconductors, ceramics, to thin films. It has an advanced beam voltage potentiometer installed on its chamber which allows for the optimized process conditions associated with the specific material being processed. It is capable of making feature sizes from 10nm to 10µm and achieving aspect ratios up to 5:1. The size of the pattern can also be adjusted and replicated quickly with repeatability and accuracy. This asset also offers additional features such as Model X+ protocol, Align X protocol, a field generated and focused using external tips, and a pattern generator. Overall, VEECO VS 300 is a reliable, repeatable and accurate ion milling equipment. It is an ideal choice for anisotropic etching and milling of high aspect ratio features in materials like metals and ceramics. The system is an optimal choice for a variety of device fabrication, thin film processing, and MEMs applications.