Used AETRIUM EM 1164 #9195409 for sale
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ID: 9195409
Dual beam focused ion beam system
Options:
FEI Magnum ion column
Digitally controlled with deflection electronics
Liquid metal ion source (LMIS):
1 pA to 20,000 pA current
30 kV Column
SEM Column with schottky SFEG source: 0.5 to 30 keV
Specimen chamber with 200 mm load-lock
5-Axis motorized stage with computerized eucentric tilt
Joy stick control
Main electronics control console
System console with Windows XP Professional OS with service pack 2
FEI XP Dualbeam control software
FEI Navigator software 7.2
Sample stage optical microscope (boroscope)
TOYO TP6530 thermal printer
Various sample cassettes:
200 mm whole wafer holder
Multi-stub holders
Leader LBO-51MA real-time ion imaging monitor
Vacuum system includes:
Turbo molecular pump and controller
Column ion pumps
ONEAC CSS2248 Power transformer
Gas injection system (GIS) with software controls:
Silane (Silicon oxide deposition)
Xenon difluoride (Enhance silicon oxide etch)
Methylcyclopentadienyl (Trimethyl)
Platinum (Platinum deposition)
Includes:
EDWARDS iQDP40 Roughing pump
Noran Vantage 2.4.2 (build 1) EDS system:
134 eV Resolution
Motorized detector
Microsoft Windows NT 4.0 OS with user guides
xL Dualbeam system user guides
2008 vintage.
AETRIUM EM 1164 is a versatile and highly reliable laboratory equipment and accessory that is designed to meet the demanding needs of research laboratories around the world. EM 1164 is a complete, self-contained environmental chamber with a wide range of features and performance. AETRIUM EM 1164 is a temperature-controlled environmental enclosure that is designed for use in a range of scientific research applications. It offers a temperature range between 10 °C and 65 °C and humidity conditions up to 100%, making it suitable for a variety of experiments and testing requirements. It also has a very fast response time, allowing for precise temperature and humidity control. EM 1164 is equipped with a multi-function display with intuitive operation and it all-in-one power supply. It also includes a comprehensive laboratory interface that is compatible with most laboratory equipment and instruments. This makes it easy and convenient to access the environmental chamber from other pieces of laboratory equipment. AETRIUM EM 1164 is designed with safety in mind, featuring an inbuilt safety monitor and interlock system. This system ensures that the environmental conditions inside the chamber remain stable and safe to work in. It also has a fan and heaters that can be controlled from outside of the chamber, allowing you to limit the heat exchange rates within the chamber. EM 1164 is equipped with an onboard memory storage capacity that allows you to store data points and environmental parameters for controlling and monitoring the conditions inside the chamber. It is also designed with a set of advanced features and accessories that make it the ideal choice for the most demanding research laboratory applications. AETRIUM EM 1164 is certified to meet international safety standards, such as IEC 61032-2 Ed. 6 (Safety of Laboratories), ISO 11446 (Testing of Environments), ISO 11448 (Monitoring and Controlling of Environments), and IEC 61938 (Risk Analysis of Experiments). It comes with a range of accessories that make it easier to use the environmental chamber, such as a multimeter probe, a sample management system, and various application-specific accessories. All in all, EM 1164 is a high-quality environmental chamber that is designed to meet the demanding needs of research laboratories around the world. It offers a range of features that make it an ideal choice for a variety of laboratory applications and experiments, including temperature and humidity control, safety monitoring, onboard data storage, and access to a range of accessories and applications.
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